The characterization of new VGMS (vacuum gauge metrology system) by the traceability of multi stage static expansion system

Koçaş, Ilknur; Sariyerli, Gokce Sevim

doi:10.1016/j.measurement.2011.10.043

Cited by 1 publication

(1 citation statement)

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“…Prior art discusses same idea of vacuum calibration system design, where the easiest way to obtain a constant pressure and maintain gas purity in the high vacuum range is to pass a steady flow of the calibration gas in to the vacuum system and out through the high vacuum pump [7]. Given the importance of uniform pressures and the number of variables that can influence this, it is important to test if the reference gauges and test gauges are sensing the same pressure [7]. Design and the size of verification chamber determine how man vacuum gauges can be mounted simultaneously.…”

Section: Custom Made Vacuum Verification Systemmentioning

confidence: 99%

Vacuum Gauge Performance Verification System

Štekleins¹,

Geriņš²,

Kromanis³

2016

Proceedings of the 27th International DAAAM Symposium 2016

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The paper analyzes a pressure deviation issues in a vacuum technological process, which occurs due to vacuum gauge inaccuracies during its use. For this purpose a unique vacuum system was designed and used for research. Developed system allows verification of vacuum gauges in manufacturing conditions using various experimental settings for obtaining necessary measuring data and allowing to perform an evaluation about its accuracy, repeatability and the need of calibration. In the following research several experiments with ionization vacuum gauges were carried out to obtain performance data. Presented results and vacuum system allowed to develop a new methodology of vacuum gauge verification under manufacturing conditions.

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Section: Custom Made Vacuum Verification Systemmentioning

confidence: 99%