The characterization of capacitive micromachined ultrasonic transducers in air

McIntosh, J.S.; Hutchins, David A.; Billson, D.R.; Robertson, T.J.; Noble, R.A.; Jones, A.D.R.

doi:10.1016/s0041-624x(02)00162-2

Cited by 21 publications

(13 citation statements)

References 11 publications

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“…The waveform is a well-damped signal, with a centre frequency of ~1.2MHz, as shown in the FFT of figure 3(b). This response agrees with those observed previously for such devices [4], and can also be modelled simply as a membrane above an air volume. The response of these devices is, to a first approximation, independent of the lateral dimensions for devices bigger than ~200µm in width.…”

Section: The Performance Of Single Elements and Arrayssupporting

confidence: 90%

“…In this paper, we will describe devices that have been fabricated at QinetiQ, Malvern, UK, using a low temperature process. Details can be found elsewhere [4] but a schematic diagram of a typical device is shown in figure 1. The device has a silicon nitride membrane, with a thickness in the range of 0.5-2µm, separated by a gap of similar size from a bottom electrode on the silicon substrate.…”

Section: Introductionmentioning

confidence: 99%

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SAFT imaging using immersed capacitive micromachined ultrasonic transducers

McIntosh

Hutchins

Billson

et al.

2002 IEEE Ultrasonics Symposium, 2002. Proceedings.

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Micromachined ultrasonic transducers (cMUTs) capable of operating in immersion mode have been designed and fabricated.As with previously reported airborne results, these immersable transducers possess extremely wide bandwidths, with operation typically ranging from low MHz extending beyond 10 MHz in water. Such wide bandwidths are of interest for many imaging applications. A range of transducer arrays have been fabricated with individual element sizes ranging from 200µm -1mm. The transducers are fabricated using an electronics-compatible micromachining process, which would allow analogue front-end electronics and transducers to be implemented on the same silicon substrate. Results will be presented from small aperture synthetic line arrays of cMUT receivers, which have been used in conjunction with a series of piezoelectric sources to allow images to be presented of reflective targets. The data is processed using a 2D Synthetic Aperture Focussing Technique (SAFT) algorithm.

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Section: The Performance Of Single Elements and Arrayssupporting

confidence: 90%

Section: Introductionmentioning

confidence: 99%

SAFT imaging using immersed capacitive micromachined ultrasonic transducers

McIntosh

Hutchins

Billson

et al.

2002 IEEE Ultrasonics Symposium, 2002. Proceedings.

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“…Introduction C apacitive micromachined ultrasonic transducers (cMUTs) [1]- [3] have the potential of replacing piezoelectric transducers in many areas. The applications include air-coupled nondestructive testing [4], [5], medical imaging [6], [7], three-dimensional (3-D) immersion imaging with 2-D transducer arrays [8], flow meters, level meters, position and distance measurements and microphones. Recently, analytical and computational models for the cMUTs have been developed [9]- [12].…”

mentioning

confidence: 99%

Optimization of the gain-bandwidth product of capacitive micromachined ultrasonic transducers

Ölçüm

Senlik

Atalar

2005

IEEE Trans. Ultrason., Ferroelect., Freq. Contr.

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Abstract-Capacitive micromachined ultrasonic transducers (cMUT) have large bandwidths, but they typically have low conversion efficiencies. This paper defines a performance measure in the form of a gain-bandwidth product and investigates the conditions in which this performance measure is maximized. A Mason model corrected with finite-element simulations is used for the purpose of optimizing parameters. There are different performance measures for transducers operating in transmit, receive, or pulse-echo modes. Basic parameters of the transducer are optimized for those operating modes. Optimized values for a cMUT with silicon nitride membrane and immersed in water are given. The effect of including an electrical matching network is considered. In particular, the effect of a shunt inductor in the gain-bandwidth product is investigated. Design tools are introduced, which are used to determine optimal dimensions of cMUTs with the specified frequency or gain response.

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“…Capacitive ultrasonic transducers (CUTs) [1][2][3] and capacitive micromachined ultrasonic transducers (cMUTs) [4][5][6][7] are well-established technologies and are finding increasing application in medical and industrial measurement. Whilst their performance in air is generally superior to that of most piezoelectric devices, membrane resonance still presents an issue where thicker membranes are required for more rugged devices.…”

Section: Introductionmentioning

confidence: 99%

Compensation network design for capacitive ultrasonic transducers

Sweeney¹,

Wright²

2009

IET Irish Signals and Systems Conference (ISSC 2009)

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_______________________________________________________________________________Abstract-The frequency response characteristic of a through transmission Capacitive Ultrasonic Transducer (CUT) system is quite often dominated by membrane resonances of the transmit and receive devices and transmission channel distortion. Simple analog filtering stages may be appropriately designed to compensate for the most pronounced of these channel effects. In many ultrasonic inspection applications a reasonable SNR of the received signal across the passband is important since frequency dependant attenuation is being measured. The design and simulation of Zobel T, lattice, and biquadratic op amp cascaded equalisation filter architectures to address this issue are presented in this work.

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The characterization of capacitive micromachined ultrasonic transducers in air

Cited by 21 publications

References 11 publications

SAFT imaging using immersed capacitive micromachined ultrasonic transducers

SAFT imaging using immersed capacitive micromachined ultrasonic transducers

Optimization of the gain-bandwidth product of capacitive micromachined ultrasonic transducers

Compensation network design for capacitive ultrasonic transducers

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