The Application of Chemical Foaming Method in the Fabrication of Micro Glass Hemisphere Resonator

Abstract

Many researchers have studied the miniaturization of the hemisphere resonator gyroscope for decades. The hemisphere resonator (HSR), as the core component, has a size that has been reduced to the submillimeter level. We developed a method of batch production of micro-hemisphere shell resonators based on a glass-blowing process to obtain larger hemisphere shells with a higher ratio of height to diameter (H/D), we introduced the chemical foaming process (CFP) and acquired an optimized hemisphere shell; the contrasted and improved H/D of the hemisphere shell are 0.61 and 0.80, respectively. Finally, we increased the volume of glass shell resonator by 51.48 times while decreasing the four-node wineglass resonant frequencies from 7.24 MHz to 0.98 MHz. The larger HSR with greater surface area is helpful for setting larger surrounding drive and sense capacitive electrodes, thereby enhancing the sensitivity of HSR to the rotation. This CFP method not only provides more convenience to control the shape of a hemisphere shell but also reduces non-negligible cost in the fabrication process. In addition, this method may inspire some other research fields, e.g., microfluidics, chemical analysis, and wafer level package (WLP).

Phosphate Glass Microspheres with Silver Nanoparticles for Whispering Gallery Mode Resonators

“…In terms of glass sphere fabrication procedures, there have been several proposed methods examined so far, but they all have significant disadvantages. For instance, protocols like the microwave plasma torch method or the sol–gel method only generate a small number of microspheres, and they both require expensive maintenance and complicated control procedures. − Namely, in the first case, the experimental setup requires constant safety checks because high temperatures are required, and in the second case, several expensive chemicals are used, and it is crucial to monitor parameters like pH, temperature, and other variables. , Moreover, methods like fine streaming into liquid nitrogen and the vertical tube furnace method also present the problems of limited material production, safety, and cost, with the additional problem that the microspheres produced by both of these methods have very specific characteristics in terms of their size and shape. , Finally, the chemical foaming method, another method being used in the microsphere fabrication, in addition to all of the negative aspects already discussed, is also prone to environmental toxicity …”

“…11,12 Finally, the chemical foaming method, another method being used in the microsphere fabrication, in addition to all of the negative aspects already discussed, is also prone to environmental toxicity. 13 Due to all of these drawbacks and challenges, a new quick, affordable, and effective method for creating microspheres is required to facilitate the production of glass microspheres for a variety of photonic applications. Based on this, in this work, we present the development of an advanced, fast, low-temperature, feasible post-melting thermal synthesis method for the development of silver phosphate (AgPO 3 ) glass microspheres.…”

“… 11 , 12 Finally, the chemical foaming method, another method being used in the microsphere fabrication, in addition to all of the negative aspects already discussed, is also prone to environmental toxicity. 13 …”