“…We emphasize the impact of the CTE anisotropy by comparing the anisotropic and isotropic CTE best-fit cases in the blue solid and dashed lines, respectively, as shown in Figure . Assuming isotropic characteristics, the CTE is estimated to be 17.30 × 10 –6 ± 1.60 × 10 –6 K –1 , which is comparable to that with a similar molecular weight, ranging from ∼55 × 10 –6 to ∼100 × 10 –6 K –1 for bulk , and thin films. ,,, The out-of-plane CTE, in-plane CTE, and CTE anisotropy of thin PMMA film are estimated to be 1.48 × 10 –6 ± 0.13 × 10 –6 K –1 , 29.90 × 10 –6 ± 2.60 × 10 –6 K –1 , and 0.050 ± 0.002, respectively. The best-fit anisotropic CTE with R 2 of ∼0.97 shows a reasonable match with the experimental data within the measurement uncertainty, while the best-fit for isotropic CTE only shows R 2 of ∼0.73.…”