Abstract:We tried to fabricate the Ge/TiO 2 composite films with the differential pressure (pumping) co-sputtering (DPCS) apparatus in order to improve the optical properties. In the study, the micro structure of these thin films has been evaluated. TEM image revealed that the thin film was alternately layered with TiO 2 and Ge, lattice fringes were observed both of Ge layer and TiO 2 layer. There were portions that lattice fringe of Ge was disturbed near the interface of Ge and TiO 2 . X-ray photoelectron spectroscopy… Show more
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