Advances in X-Ray Analysis 1967
DOI: 10.1007/978-1-4684-7835-8_14
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The Analysis of Berg-Barrett Skew Reflections and Their Applications in the Observation of Process-Induced Imperfections in (111) Silicon Wafers

E. M. Juleff1,
A. Lapierre2,
R. G. Wolfson3
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