2019
DOI: 10.1016/j.ceramint.2018.10.061
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The adhesion and tribological properties of c-BN films deposited by high power impulse magnetron sputtering

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Cited by 12 publications
(3 citation statements)
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“…The highest film thickness of 1044 nm was achieved in sample R1, characterized by the lowest nitrogen content. However, as the N2 concentration increased, a nitride phase (TaN) formed on the substrate surfaces within the reactive gas chamber [8]. Consequently, the deposition rate decreased, leading to a proportional reduction in film thickness for samples R2 and R3 (see Table 1).…”
Section: Resultsmentioning
confidence: 99%
See 1 more Smart Citation
“…The highest film thickness of 1044 nm was achieved in sample R1, characterized by the lowest nitrogen content. However, as the N2 concentration increased, a nitride phase (TaN) formed on the substrate surfaces within the reactive gas chamber [8]. Consequently, the deposition rate decreased, leading to a proportional reduction in film thickness for samples R2 and R3 (see Table 1).…”
Section: Resultsmentioning
confidence: 99%
“…HiPIMS, one of the novel PVD methods, generates a dense plasma by ionizing the sputtering target with short-duration, high-power pulses. This results in extremely intense and high-quality plasma generation [8]. The use of advanced coating materials to address issues in industrial applications is growing in popularity.…”
Section: Introductionmentioning
confidence: 99%
“…[45] Unique crystal structures and different morphological models endow BN nanomaterials unique physical and chemical properties such as high temperature resistance, oxidation resistance, heat conduction, electrical insulation, and neutron absorption, [16,46,47] and make them applicable in cosmetics, heat insulation, optoelectronics, waste gas purification, [48,49] antiradiation devices, ultraviolet space, wave transmission, highperformance aviation anti-friction, missiles, launch vehicles and other military aerospace fields. [44,50] However, most research focuses on one aspect, such as nanostructures (h-BN, [51,52] c-BN, [53] BN nanoscrolls, [16] etc. ), performance (thermology, [54][55][56][57] optics, [58][59][60] electricity, [61][62][63] mechanical property, [64] etc.…”
Section: Introductionmentioning
confidence: 99%