The 3D Monolithically Integrated Hardware Based Neural System with Enhanced Memory Window of the Volatile and Non‐Volatile Devices
Yu‐Rim Jeon,
Donguk Seo,
Yoonmyung Lee
et al.
Abstract:Abstract3D neuromorphic hardware system is first demonstrated in neuromorphic application as on‐chip level by integrating array devices with CMOS circuits after wafer bonding (WB) and interconnection process. The memory window of synaptic device is degraded after WB and 3 Dimesional (3D) integration due to process defects and thermal stress. To address this degradation, Ag diffusion in materials of Ta2O5 and HfO2 is studied in a volatile memristor, furthermore, the interconnection and gate metal Ru are investi… Show more
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