Abstract:A monolithic wafer‐level dielectric‐filled rectangular waveguide for millimeter‐wave applications is designed and fabricated. Unlike the existing wafer‐level rectangular waveguides that are based on hybrid integration techniques to assemble the waveguide, the three‐step fabrication process of the proposed waveguide enables the simultaneous monolithic fabrication of the dielectric‐filled waveguide as well as planar circuitry on one substrate. The maximum temperature during the entire fabrication process stays l… Show more
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.