Texture in films: Selected examples

Abstract

The paper contains a brief discussion of research on texture and properties of films. Three examples are selected to illustrate problems of understanding of texture development and correlation between texture and properties of films. Various correlations between texture related structural characteristics of film and probability of failure of A1-Cu interconnects line are presented to illustrate the need for a better understanding of the correlation between texture and failure mechanism. Another example on development of texture in nickel films illustrates processes that influence texture development and type of interfaces between oxide grains. It is demonstrated that texture and grain boundary character distribution decides the rate of oxidation of Nickel. An example of Co-Cr films for magnetic recording media illustrates an important role of texture in controlling the magnetic properties of films for application in perpendicular magnetic recording. Principles of methods that are used to calculate texture influence on magnetic properties are discussed.