Abstract:In present and future technology nodes, the insertion of metal filling can lead to timing yield losses. In this paper, we present a test structure generation method to study the impact of metal filling on interconnect timings. Such a method is mandatory when dealing with metal filling, because its insertion in real design does not follow standardized rules. The proposed test structure generation method is based on Design Of Experiment (DOE) to minimize the number of structures. The DOE approach links test stru… Show more
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