1995
DOI: 10.1016/0022-0248(95)00373-8
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Test of Vegard's law in thin epitaxial SiGe layers

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Cited by 88 publications
(39 citation statements)
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“…The SiGe lattice parameter is calculated from Vegard's law as described in Ref. [8]. The difference between these models can be seen in Fig.…”
Section: Model-based Extraction Of Carbon Concentrationmentioning
confidence: 99%
“…The SiGe lattice parameter is calculated from Vegard's law as described in Ref. [8]. The difference between these models can be seen in Fig.…”
Section: Model-based Extraction Of Carbon Concentrationmentioning
confidence: 99%
“…A good illustration of the experimental difficulties associated with thin film measurements is provided by the work of Kasper et al, 14 who determined the lattice parameter in Si 1-x Ge x films grown pseudomorphically on Si and could only verify Dismukes' earlier bulk data 4 in a semi-quantitative way due to the uncertainties in the Ge concentrations and in the strain corrections. In the case of Ge 1-y Sn y alloys, the experimental evidence so far is based on measurements of Ge 1-y Sn y films grown directly on (001) Si.…”
mentioning
confidence: 99%
“…A more exact calculation considering parabolic deviation of lattice constant of SiGe [17,18] delivers slight negative values of R Si . This underlines that Raman measurements of R Si are only accurate within about 10% limits.…”
Section: Raman Characterization Of Local S-simentioning
confidence: 98%