Ternary and quarternary TiSiN and TiSiCN nanocomposite coatings obtained by Chemical Vapor Deposition

Comparison of crack resistance between ternary CrSiC and quaternary CrSiCN coatings via nanoindentation

“…It is worth noting that no diffraction peaks of SiC and Si 3 N 4 crystals were detected in XRD spectra. Thus, the silicon in CrSiC and CrSiCN coatings should exist in terms of amorphous SiC x and SiN x , which has been covered by other research groups [24][25][26][27][28].…”

“…3. Obviously, the main peak of all the CrSiCN coatings could be deconvoluted into two overlapped peaks related to Si-C bond around 101.1 eV and Si-N bond around 101.8 eV [24,[39][40][41]. Moreover, the volume fraction of Si-N bond increases with increasing Si concentration, and finally a novel and weak Si-Si bond presents at 99.2 eV due to higher Si incorporation in CrSiCN (30) …”

“…Thereby, in order to meet growing requirement in industry for superior coatings with good mechanical and tribological properties, academic circles have concentrated on building a composite architecture of nano-crystal dispersing into amorphous SiN x matrix . One of the most common ways is to introduce Si element into transition metalbased coatings such as TiN [6][7][8][9][10][11][12], CrN [13][14][15][16][17][18][19], ZrN [20], MoN [21], TaN [22], TiCN [23][24][25] and CrCN [26][27][28]. For instance, TiSiN coatings presented high hardness over 30 GPa due to refined grain, compact microstructure and a nano-composite architecture after Si addition [9][10][11].…”

Microstructure, hardness and corrosion behaviour of Ti/TiN multilayer coatings produced by plasma activated EB-PVD

“…The application of TiN coatings is a proven process which protects the blades from corrosion/erosion attack from dust/debris and water droplets in the inlet air [4]. Moreover, multi-element nitride coatings, such as TiAlN [5], TiZrN [6], and TiSiCN [7] have been investigated for better performance.…”

Electrochemical and Tribological Properties of TiSiCN Coatings in Coolant

“…For example, Ref. [8] has reported that a higher hardness of 42.9 GPa was obtained for TiSiCN coatings as compared with TiCN coating (17.3 GPa). Ref.…”