Termination materials for thin film resistors

Fisher, Jon; Hall, P. M.

doi:10.1109/proc.1971.8448

“…4 The resistance of a thin f'tim resistor can be considered as consisting of three parts" the resistance of the resistive material, the resistance of the conductor layer and the interfacial resistance. The contribution of the interfacial resistance can be described by a R.T. Galla adaptation of an analysis by R.T. Galla, the resistance of the model is made up of three terms (1) Where L is the length of the resistor, d the length of the conductor at one end and w the width. The first term represents the main body of the resistor.…”

Section: Discussionmentioning

confidence: 99%

Aging degradation of Ni and NiCr-Ni thin film conductor systems

1983

Microelectronics Reliability

0

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In this paper an experimental procedure for the evaluation of the Ni and NiCr-Ni new low cost conductor systems is described. The possibility of an application of these conductor systems as a contact material for thin film resistors has been examined. A special test pattern with intermittent pattern resistors and meander patterns of conductor and resistive material was applied. The quality of thin film resistor contacts is defined by the constancy of their electrical and physical properties during exploitation. Following the R.T. Galla distributed parameter analysis model the calculation of the aging degradation of the Ni and NiCr-Ni conductor systems has been carried out.Considering the degradation values it seems that the Ni one-component conductor system is superior to the NiCr-Ni two-component system. From this investigation we can conclude that the quality of studied conductor systems is satisfactory in applications where corrosion resistance is not critical.

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“…Numerous publications on different aspects of resistor fabrication and characterization have appeared in the literature during the past fifteen years. [1][2][3][4][5][6][7][8][9][10][11][12][13][14][15][16][17][18][19] Conventionally a multilayer Ti-Pd-Au conductor system is used as the contact metallization for NiCr resistors. 11 In recent years due to increased cost of the precious metals a need for a low cost replacement metallization for the expensive Ti-Pd-Au has been realized.…”

Section: Introductionmentioning

confidence: 99%

Electrical properties of RF sputtered NiCr thin film resistors with Cu contacts

1984

Microelectronics Reliability

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Investigations on RF sputtered NiCr thin film resistors, fabricated using Cu as conductor metallization, were made. The contact resistance characteristics, resistor film characteristics and TCR of the resistors were measured. The effect of heat treatment on the resistor characteristics was studied. A suitable annealing cycle for the resistor stabilization was studied. A suitable annealing cycle for the resistor stabilization was obtained. The effect of passivation by a thin quartz film on the resistor properties was also examined. The results are presented and discussed in this paper.

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“…Numerous publications on different aspects of resistor fabrication and characterization have appeared in the literature during the past fifteen years. [1][2][3][4][5][6][7][8][9][10][11][12][13][14][15][16][17][18][19] Conventionally a multilayer Ti-Pd-Au conductor system is used as the contact metallization for NiCr resistors. 11 In recent years due to increased cost of the precious metals a need for a low cost replacement metallization for the expensive Ti-Pd-Au has been realized.…”

Section: Introductionmentioning

confidence: 99%

Electrical Properties of RF Sputtered NiCr Thin Film Resistors With Cu Contacts

Nahar

¹

,

Devashrayee

²

1982

Active and Passive Electronic Components

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Investigations on RF sputtered NiCr thin film resistors, fabricated using Cu as conductor metallization, were made. The contact resistance characteristics, resistor film characteristics and TCR of the resistors were measured. The effect of heat treatment on the resistor characteristics was studied. A suitable annealing cycle for the resistor stabilization was studied. A suitable annealing cycle for the resistor stabilization was obtained. The effect of passivation by a thin quartz film on the resistor properties was also examined. The results are presented and discussed in this paper.

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Termination materials for thin film resistors

Cited by 25 publications

References 3 publications

Aging degradation of Ni and NiCr-Ni thin film conductor systems

Aging degradation of Ni and NiCr-Ni thin film conductor systems

Electrical properties of RF sputtered NiCr thin film resistors with Cu contacts

Electrical Properties of RF Sputtered NiCr Thin Film Resistors With Cu Contacts

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