Terahertz Silicon–BCB–Quartz Dielectric Waveguide: An Efficient Platform for Compact THz Systems

Amarloo, Hadi; Ranjkesh, Nazy; Safavi‐Naeini, Safieddin

doi:10.1109/tthz.2017.2788202

Cited by 27 publications

(8 citation statements)

References 33 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Similar to integrated circuits in the RF and microwave domain [7,8] or photonic integrated circuits at the telecom bands in the near infrared there exist integrated terahertz systems. These include electronic systems based on fundamental oscillators at the lower end of the terahertz range [9] or frequency multiplier-based systems [6], both frequently using hollow metallic waveguides with microstrip transitions to active elements, as well as dielectric waveguide-based systems [10][11][12]. While the waveguide concepts generally allow for large bandwidths, the lack of broadband characterization tools as well as comparatively narrowband transitions to active elements typically restrict the operational bandwidth to typically not more than 10-50% of the centre frequency.…”

Section: Introductionmentioning

confidence: 99%

Broadband Terahertz Photonic Integrated Circuit with Integrated Active Photonic Devices

2021

View full text Add to dashboard Cite

Present-day photonic terahertz (100 GHz–10 THz) systems offer dynamic ranges beyond 100 dB and frequency coverage beyond 4 THz. They yet predominantly employ free-space Terahertz propagation, lacking integration depth and miniaturisation capabilities without sacrificing their extreme frequency coverage. In this work, we present a high resistivity silicon-on-insulator-based multimodal waveguide topology including active components (e.g., THz receivers) as well as passive components (couplers/splitters, bends, resonators) investigated over a frequency range of 0.5–1.6 THz. The waveguides have a single mode bandwidth between 0.5–0.75 THz; however, above 1 THz, these waveguides can be operated in the overmoded regime offering lower loss than commonly implemented hollow metal waveguides, operated in the fundamental mode. Supported by quartz and polyethylene substrates, the platform for Terahertz photonic integrated circuits (Tera-PICs) is mechanically stable and easily integrable. Additionally, we demonstrate several key components for Tera-PICs: low loss bends with radii ∼2 mm, a Vivaldi antenna-based efficient near-field coupling to active devices, a 3-dB splitter and a filter based on a whispering gallery mode resonator.

show abstract

Section: Introductionmentioning

confidence: 99%

Broadband Terahertz Photonic Integrated Circuit with Integrated Active Photonic Devices

2021

View full text Add to dashboard Cite

show abstract

“…All-dielectric terahertz waveguides have been realized in a silicon-on-insulator platform, in which high-index micro-scale silicon waveguides rest upon a supporting dielectric substrate [10], [11]. The substrate is frequently more absorptive than intrinsic silicon, but losses in the substrate can be lessened by excavating a portion of dielectric beneath the waveguide, to realize suspended waveguides [12]- [14].…”

Section: Introductionmentioning

confidence: 99%

Unclad Microphotonics for Terahertz Waveguides and Systems

Headland

Withayachumnankul

et al. 2020

J. Lightwave Technol.

View full text Add to dashboard Cite

A practical approach to realize substrateless, unclad, micro-scale intrinsic silicon waveguides for the terahertz range is presented. The waveguides are monolithically integrated within a supporting silicon frame, with which they are fabricated together from the same silicon wafer in a single-mask etching process. This establishes an integration platform to house many diverse components, and facilitates packaging. Effective medium techniques are deployed to prevent the frame from interfering with the waveguide's functionality. Straight waveguides of this sort are experimentally found to be efficient and broadband. Elementary components including Y-junctions and evanescent couplers are developed, and deployed in demonstrations of applications for terahertz waves, including sensing and communications. This is a promising pathway to realize future microphotonic devices for diverse applications of terahertz waves.

show abstract

“…[3,4] To date, various terahertz waveguide solutions based on technologies from both electronics and photonics have been proposed, generally including fiber-like waveguides [5][6][7][8][9][10][11][12] and planar chip-like waveguides. [13][14][15][16][17][18][19][20][21][22][23] In contrast to terahertz fibers, terahertz waveguide chips are flat enough to be integrated into larger devices and able to append functionalities inside the waveguide chips.…”

Section: Introductionmentioning

confidence: 99%

“…[15] To reduce the fabrication complexity and improve the dimensional accuracy, several low-loss terahertz waveguides fabricated using silicon-onglass technology were reported, such as dielectric microstrip lines. [17,18,22] However, the relatively high refractive index of silicon narrows the single-mode operation bandwidth, [18,32] or the waveguide operates in a multimode frequency range. [17] Benefiting from the low-loss properties of silicon in the terahertz range, silicon-based PC slabs (circular air holes in a triangular lattice) have also been proposed for guiding terahertz radiation in 2015 and 2017.…”

Section: Introductionmentioning

confidence: 99%

“…[17,18,22] However, the relatively high refractive index of silicon narrows the single-mode operation bandwidth, [18,32] or the waveguide operates in a multimode frequency range. [17] Benefiting from the low-loss properties of silicon in the terahertz range, silicon-based PC slabs (circular air holes in a triangular lattice) have also been proposed for guiding terahertz radiation in 2015 and 2017. [14,19] Such PC waveguides can offer low propagation losses (below 0.01 dB mm -1 ) in a very narrow frequency range (0.326-0.331 THz), [19] i.e., their bandwidth is two orders of magnitude narrower than that of their metallic counterparts.…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Broadband Single‐Mode Hybrid Photonic Crystal Waveguides for Terahertz Integration on a Chip

Low

Ako

et al. 2020

Adv Materials Technologies

View full text Add to dashboard Cite

Broadband, low-loss, low-dispersion propagation of terahertz pulses in compact waveguide chips is indispensable for terahertz integration. Conventional two-dimensional photonic crystals (PCs) based terahertz waveguides are either all-metallic or all-dielectric, having either high propagation losses due to the Ohmic loss of metal, or a narrow transmission bandwidth restricted by the range of single-mode operation in a frequency range defined by the PC bandgap, respectively. To address this problem, a hybrid (metal/dielectric) terahertz waveguide chip is developed, where the guided mode is completely confined by parallel gold plates and silicon PCs in vertical and lateral directions, respectively. A unique multi-wafer silicon-based fabrication process, including gold-silicon eutectic bonding, micropatterning, and Bosch silicon etching, is employed to achieve the self-supporting hybrid structure. Theoretical and experimental investigations demonstrate that the hybrid waveguide supports a singlemode transmission covering 0.367-0.411 THz (bandwidth of 44 GHz, over twice wider than that of allsilicon PC waveguides) with low loss (below 0.05 dB mm -1 ) and low group velocity dispersion (from -8.4 ps THz -1 mm -1 to -0.8 ps THz -1 mm -1 ). This work enables more compact, wideband terahertz waveguides and auxiliary functional components that are integratable in chips towards ultra-highdensity integrated terahertz devices in particular in the field of wireless communications.Received: ((will be filled in by the editorial staff))Revised: ((will be filled in by the editorial staff))

show abstract

Terahertz Silicon–BCB–Quartz Dielectric Waveguide: An Efficient Platform for Compact THz Systems

Cited by 27 publications

References 33 publications

Broadband Terahertz Photonic Integrated Circuit with Integrated Active Photonic Devices

Broadband Terahertz Photonic Integrated Circuit with Integrated Active Photonic Devices

Unclad Microphotonics for Terahertz Waveguides and Systems

Broadband Single‐Mode Hybrid Photonic Crystal Waveguides for Terahertz Integration on a Chip

Contact Info

Product

Resources

About