Terahertz All-Dielectric Metalens: Design and Fabrication Features

Gusev, E. Yu.; Klimin, V. S.; Avdeev, S. P.; Kislyak, P. E.; Gaidukasov, R. A.; Wang, S.; Wang, Z.; Ren, X.; Chen, D.; Han, L.; Zhang, W.; Ageev, O. A.

doi:10.1134/s1063739723600607

Russ Microelectron

2023

DOI: 10.1134/s1063739723600607

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Terahertz All-Dielectric Metalens: Design and Fabrication Features

E. Yu. Gusev,

V. S. Klimin,

S. P. Avdeev

et al.

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Terahertz All-Dielectric Metalens: Design and Fabrication Features

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