SiC-based fibers with various chemical compositions were synthesized using an irradiation-curing process. Polycarbosilane (PCS) fibers were cured by irradiation with an electron beam in a helium atmosphere. The cured PCS fibers were pyrolyzed at 1300°C under controlled hydrogen or argon atmospheres, and SiC fibers with C/Si of 0.84 to 1.56 were obtained. The fibers consisted of <1.0 wt% O, <0.2 wt% N, <0.1 wt% H, with the balance being Si and C. The mechanism of pyrolytic transformation of cured PCS to SiC-based ceramics was investigated using TG/DTA analysis. Greater mass losses were observed during pyrolysis in a hydrogen atmosphere than in argon. This result suggests that the hydrogen atmosphere suppresses H 2 evolution and helps to remove excess carbon as CH 4 during pyrolysis. The microstructure and mechanical properties of the resulting SiC-based fibers were found to be very dependent on their C/Si chemical compositions.