2021
DOI: 10.1002/pssa.202100293
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Tensile Strained Germanium Microstructures: A Comprehensive Analysis of Thermo‐Opto‐Mechanical Properties

Abstract: The influence of the thermomechanical effects on the optical properties of germanium microstructures is investigated. Finite element method (FEM) calculations allow a complete spatial assessment of mechanical deformations induced by a silicon nitride (SiN) stressor layer deposited on Ge micropillars. Simulated strain maps are confirmed by experimental maps obtained by Raman spectroscopy. The theoretical investigation on strain‐dependent band structure, including the presence of a strain gradient along the long… Show more

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Cited by 3 publications
(10 citation statements)
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(31 reference statements)
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“…This lets us to conclude that the strain is not impacting α and β but only the E g (0) parameter, as we previously observed for pure Ge. [14] The energy shift due to strain can be calculated analytically, [51,52] and confirms the measured value for a measured difference in strain of 0.28%. [46] estimations of E g at 300 K with the value calculated from the analysis reported in the text for the thickest samples of all the available concentrations in Table 1.…”
Section: Optical Properties: Plsupporting
confidence: 65%
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“…This lets us to conclude that the strain is not impacting α and β but only the E g (0) parameter, as we previously observed for pure Ge. [14] The energy shift due to strain can be calculated analytically, [51,52] and confirms the measured value for a measured difference in strain of 0.28%. [46] estimations of E g at 300 K with the value calculated from the analysis reported in the text for the thickest samples of all the available concentrations in Table 1.…”
Section: Optical Properties: Plsupporting
confidence: 65%
“…The mechanical deformation is evaluated according to Hooke's law [14] in a 3D description to offer a complete overview of all the strain field components.…”
Section: Fem Calculationsmentioning
confidence: 99%
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