Tensile measurement of single crystal gallium nitride nanowires on MEMS test stages

Piezoresistivity Characterization of Synthetic Silicon Nanowires Using a MEMS Device

“…Nanomaterials can be fabricated directly on MEMS devices [9], [30]. Presynthesized nanomaterials were also transferred onto MEMS devices via dielectrophoresis trapping [12], [22], [31], focused-ion-beam deposition [14], and direct pick and place [11], [13], [17], [20], [32]- [35]. Due to the flexibility of pick-and-place nanomanipulation inside SEM and no need for nanomaterial preprocessing (e.g., sonication), we transferred individual silicon nanowires from growth substrates onto MEMS devices via direct pick and place.…”

“…For example, electrostatic actuators [10], [13], [20] and electrothermal actuators [13], [22] were utilized to stretch nanomaterial specimens. MEMS capacitive sensors were incorporated into some of the MEMS devices [11], [20] to measure tensile forces of the specimen.…”

Radio-frequency and DC electrical characterization on a modular MEMS mechanical test platform for nanomaterials

“…Dielectrophoretic self-assembly [10] was used to place n-type Si-doped GaN single crystal nanowire (NW) specimens across the suspended coplanar waveguide before test coupons were interfaced to the UTP. Using metallized test coupons by themselves in a standard microsystem probe station, probes from the probe station were contacted to the waveguide central conductors and supplied with a ~65 kHz signal in order to drive NW dielectrophoresis.…”

“…Because the waveguide conductors were used to supply the electrical signal for dielectrophoresis, the NWs self-assembled to span the the gap in waveguide conductors between the tensile stage regions of the test coupons. After the solvent evaporated, the NWs were clamped to the center conductors using Pt clamps formed by ion beam induced deposition (IBID) in a dual beam focused ion beam scanning electron microscope (FIB-SEM) [10]. After a brief cleaning with the Ga 3+ ion beam to reduce organic residue on the ends of the NWs, the clamps were deposited and provided both mechanical clamping and electrical contact to the waveguide center conductors.…”

Evaluation of Effective Elastic Properties of Nitride NWs/Polymer Composite Materials Using Laser-Generated Surface Acoustic Waves

“…Studied by these two techniques, the values of the Young modulus published in the literature are controversial. Indeed, one part of the published studies shows that the Young modulus decreases by reducing the NW diameter [7,10], while others present the opposite behavior, i.e., the Young modulus increases with the NW diameter reduction [7,11]. Finally, some publications report the independence of the Young modulus from the wire diameter [12].…”