Ten implementations of ptychography

Abstract

Ptychography is an increasingly popular phase retrieval imaging technique, able to routinely deliver quantitative phase images with extended field of view at diffraction limited resolution. Different variants of this technique, like Bragg ptychography and Fourier ptychography, have also been developed and applied to various fields. Here we experimentally demonstrate 10 ways to implement the conventional real space transmission ptychography, and compare their properties to provide a guide to choosing the optimal setup for a specific application.

Lensless EUV mask inspection for anamorphic patterns

“…5 The information redundancy thus produced allows to reconstruct the amplitude and the phase of the sample. Ptychography can be implemented in several ways 6 and for the current experiment we used an hybrid algorithm combining the difference map 7 and the rPIE approach. 8 Both these methods rely on the fast Fourier transform algorithm to model the propagation of the electromagnetic field from the sample to the detector plane and back in an iterative manner.…”

Lensless metrology for semiconductor lithography at EUV

“…where F is the appropriate propagation operator that depends on the optical configuration of the system. 7 The complex intensity distribution on the detector plane can be expressed as:…”

“…This task is usually undertaken with iterative procedures. [7][8][9][10] For the current application, we implemented a method based on the difference map algorithm. 6…”

Correction of axial position uncertainty and systematic detector errors in ptychographic diffraction imaging

“…[1][2][3] Its ability to recover illumination and object information with phase contrast sensitivity without the need for sophisticated specimen preparation makes it suitable for both beam diagnostics 4,5 and quantitative imaging [6][7][8][9] in a variety of spectral ranges and experimental geometries. [10][11][12][13] However, PCDI relies on accurate experimental calibration, and incorrect modeling of the data can lead to reconstruction artifacts. Here, we report on correction schemes to mitigate detector-sided systematic errors, namely axial position uncertainty, point spread, and inhomegeneous response.…”