Temporal Behavior of Modulated Reflectance Signal in Silicon

Rosencwaig, Allan; Opsal, Jon; Taylor, Michael W.

doi:10.1007/978-1-4613-1893-4_27

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1987

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“…These waves are detected by the probe He-Ne laser through the pump-induced modulation of the sample reflectivity at the wavelength of the probe laser [13][14][15]. The modulated reflectance signal is a sensitive measure of the amount of lattice damage or disorder in the bulk crystal and of the presence of defect surface states [16]. Previously, modulated reflectance measurements have proven to be effective as a production monitor of ion implanted dose and dose uniformity [17][18].…”

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confidence: 99%