Template-controlled piezoactivity of ZnO thin films grown via a bioinspired approach

Blumenstein, Nina J.; Streb, Fabian; Walheim, Stefan; Schimmel, Thomas; Burghard, Zaklina

doi:10.3762/bjnano.8.32

Cited by 5 publications

(4 citation statements)

References 50 publications

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“…As the c‐axis is the polar axis in the hexagonal wurtzite structure, a strong (002) preferential orientation of the crystallites is desired to enhance the measured piezoelectric current. [ 17,18,22,35,36 ]…”

Section: Resultsmentioning

confidence: 99%

Piezoelectric Properties of Zinc Oxide Thin Films Grown by Plasma‐Enhanced Atomic Layer Deposition

Ali

Pilz

Schäffner

et al. 2020

Physica Status Solidi (a)

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Zinc oxide (ZnO) thin films are deposited by plasma‐enhanced atomic layer deposition (PE‐ALD). This deposition method allows depositing stoichiometric and highly resistive ZnO films at room temperature. Despite such important requirements for piezoelectricity being met, not much is known in literature about the piezoelectric properties of ZnO thin films (<70 nm) deposited by PE‐ALD. The films are grown at different substrate temperatures to investigate the effect on crystalline and piezoelectric properties. Films deposited on flexible poly(ethylene terephthalate) (PET) generated a higher piezoelectric current (>1.8 nA) and charge (>80 pC) compared with films deposited on glass (>0.3 nA and >30 pC) due to bending effects of the substrate when mechanically excited. Furthermore, increasing the substrate temperature, during deposition, enhances the growth along the (002) crystallographic orientation, which further strengthens the generated piezoelectric current signal for mechanical excitations along the ZnO film's c‐axis.

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Section: Resultsmentioning

confidence: 99%

Piezoelectric Properties of Zinc Oxide Thin Films Grown by Plasma‐Enhanced Atomic Layer Deposition

Ali

Pilz

Schäffner

et al. 2020

Physica Status Solidi (a)

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“…The presence of (002) orientated crystallites in ZnO enhances the piezoelectric response to force excitation parallel to the z-axis. [36,[49][50][51] In the FEM model, ZnO is single crystalline, therefore the piezoelectric axis is oriented either completely along the (100) direction, or completely along the (002) one. As shown in Figure 3d, the piezoelectric charge obtained from the simulation with a (002) oriented ZnO single crystal is higher than the piezoelectric charge obtained from the simulation with (100) orientation.…”

Section: Full-area Force Responsementioning

confidence: 99%

Smart Core‐Shell Nanostructures for Force, Humidity, and Temperature Multi‐Stimuli Responsiveness

Ali

Schäffner

Belegratis

et al. 2022

Adv Materials Technologies

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stimuli and transmits the information to the brain. [1] In the last decade, a substantial understanding of how this complex system behaves has been gained. [2][3][4] Nevertheless, its replication to form artificial skins is still a relatively new field with massive potential. Relying on advancements in functional materials, structural design, and state-of-art production/deposition techniques, a wide variety of single/ multi-stimuli responsive sensory systems, suitable for electronic skin (e-skin) applications, have been reported. [5][6][7][8] An efficient e-skin design requires a combination of functional materials with suitable mechanical and electrical properties, [9] in addition to the micro/nanoscale control of the layer's thickness and dimensions, which is optimized by the choice of suitable fabrication techniques.For pressure and force detection, the most common methods exploit piezoelectric, piezoresistive, or capacitive sensing. [10][11][12][13] Bao's group investigated an e-skin design based on flexible pressure-sensitive organic thinfilm transistors deploying a force-sensitive gate dielectric capacitance. The sensor has a maximum sensitivity of 8.4 kPa −1 and a fast response time of 10 ms. This was realized with a combination of microstructured polydimethylsiloxane (PDMS) gate dielectric and a high-mobility semiconducting polymer in a transistor design. The sensor relies on capacitance change due to mechanical excitations. [14] Another pressure-sensitive e-skin design, investigated by Bao's group, is realized by a composite piezoresistive material consisting of an organic polymer and nickel nanostructured microparticles. [15] Park and Jang investigated hybrid piezoelectric/piezoresistive pressure sensors based on a nanohybrid material from graphene with free-standing nanofibers of PEDOT/P(VDF-HFP). Their e-skin device impresses with a gauge factor as high as 320 under tensile strain thus showing high sensitivity to pressure with a low limit of detection of 0.5 Pa only. [16] Humidity sensors for e-skin applications have also been investigated. [17,18] Guo et al. demonstrated that a tungsten sulfite (WS 2 ) film combined with graphene electrodes and PDMS substrate exhibits a high humidity response (up to 90% relative humidity or RH) due to the change in the WS 2 conductivity. [19] Similarly, e-skin sensitivity to changes in surrounding temperature is desired and has been investigated. [20][21][22] Chen et al.A force, humidity, and temperature-responsive electronic skin is presented by combining piezoelectric zinc oxide (ZnO) and poly-N-vinylcaprolactamco-di(ethylene glycol) divinyl ether hydrogel into core-shell nanostructures using state-of-the-art dry vapor-based techniques. The proposed concept is realized with biocompatible materials in a simplified design that delivers multi-stimuli sensitivity with high spatial resolution, all of which are prerequisites for an efficient electronic skin. While the piezoelectricity of ZnO provides sensitivity to external force, the thermoresponsiveness of the hydrogel...

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“…The application of oxide thin films is quite diverse due to their excellent properties [1][2][3][4][5], such as dielectric properties [6][7][8] for the production of metamaterials [9]. Metamaterials applied in the field of space science come with a new dimension of microstructural representation of advanced functional materials [10,11].…”

Section: Introductionmentioning

confidence: 99%

Structural and optical characteristics determined by the sputtering deposition conditions of oxide thin films

Prepelita¹,

Garoi²,

Crăciun³

2021

Beilstein J. Nanotechnol.

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The influence of film thickness on the structural and optical properties of silicon dioxide (SiO2) and zinc oxide (ZnO) thin films deposited by radio frequency magnetron sputtering on quartz substrates was investigated. The deposition conditions were optimized to achieve stoichiometric thin films. The orientation of crystallites, structure, and composition were investigated by X-ray diffraction (XRD) and X-ray photoelectron spectroscopy (XPS), while the surface topography of the samples was analyzed using scanning electron microscopy (SEM). The optical characteristics were measured for samples with the same composition but obtained with different deposition parameters, such as increasing thickness. The optical constants (i.e., the refractive index n, the extinction coefficient k, and the absorption coefficient α) of the SiO2 and ZnO oxide films were determined from the transmission spectra recorded in the range of 190–2500 nm by using the Swanepoel method, while the energy bandgap was calculated from the absorption spectra. The influence of thickness on the structural and optical properties of the oxide films was investigated. Good optical quality and performance were noticed, which makes these thin films worthy of integration into metamaterial structures.

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Template-controlled piezoactivity of ZnO thin films grown via a bioinspired approach

Cited by 5 publications

References 50 publications

Piezoelectric Properties of Zinc Oxide Thin Films Grown by Plasma‐Enhanced Atomic Layer Deposition

Piezoelectric Properties of Zinc Oxide Thin Films Grown by Plasma‐Enhanced Atomic Layer Deposition

Smart Core‐Shell Nanostructures for Force, Humidity, and Temperature Multi‐Stimuli Responsiveness

Structural and optical characteristics determined by the sputtering deposition conditions of oxide thin films

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