Temperature effect on structural, mechanical properties and corrosion behaviour of CrN thin films deposited by magnetron sputtering

Abdallah, B.; Kakhia, M.; Alssadat, W.; Zetoun, W.

doi:10.1049/mnl.2019.0600

Cited by 11 publications

(4 citation statements)

References 40 publications

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“…Due to the small amount of energy left with the sputtered atoms, the film was depos- There is a great impact of substrate temperature on the properties of the deposited film. Abdallah et al 56 have deposited CrN on Si and SS-304 substrate and found that with increase in substrate temperature, the rate of deposition increased. They found that the microhardness and grain size of the film decreased with increase in substrate temperature.…”

Section: Effect Of Sputtering Parameters On Properties Of Crn Coating...mentioning

confidence: 99%

The effect of sputtering parameters and doping on the properties of CrN‐based coatings—A critical review

Tiwari,

Rao,

Kharb

et al. 2024

Surface & Interface Analysis

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Chromium‐based coatings have been of interest to researchers for the last two decades because of their extraordinary properties like high hardness, high wear, and corrosion resistance properties. However, it is in practice and research to increase the properties of Cr‐based coatings for high‐temperature applications. Numerous dopants like silicon (Si), titanium (Ti), vanadium (V), aluminum (Al), and zirconium (Zr) have been used together with Cr to achieve enhanced properties. The plasma‐based sputtering process is one of the popular and reliable techniques to deposit thin film coatings. The substrate material, processed gas and pressure, substrate temperature, film thickness, and so on also play a significant role in varying the properties and microstructure of the deposited film. Several researchers have deposited Cr/CrN‐based thin films via the chemical vapor deposition technique (CVD) and physical vapor deposition technique (PVD) to study their properties and behavior at room temperature as well as for high‐temperature applications. This work reflects the review of work done to deposit Cr/CrN‐based coatings deposited via PVD: more specifically sputtering technique. The effect of doping in the CrN matrix and variation in sputtering parameters on the properties of CrN‐based coatings have also been studied.

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Section: Effect Of Sputtering Parameters On Properties Of Crn Coating...mentioning

confidence: 99%

The effect of sputtering parameters and doping on the properties of CrN‐based coatings—A critical review

Tiwari,

Rao,

Kharb

et al. 2024

Surface & Interface Analysis

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show abstract

“…This particular trait is beneficial in applications demanding minimal friction and enhanced lubricity, such as sliding or rotating components. In addition to these properties, the coating possesses commendable chemical stability, corrosion resistance, and oxidation resistance [ 19 , 20 , 21 , 22 , 23 , 24 , 25 ]. This is achieved by forming a protective barrier that prevents the underlying material from reacting with the corrosive substances.…”

Section: Introductionmentioning

confidence: 99%

Comparison of CrN Coatings Prepared Using High-Power Impulse Magnetron Sputtering and Direct Current Magnetron Sputtering

Bai,

Li,

Gao

et al. 2023

Materials

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Chromium Nitride (CrN) coatings have widespread utilization across numerous industrial applications, primarily attributed to their excellent properties. Among the different methods for CrN coating synthesis, direct current magnetron sputtering (DCMS) has been the dominant technique applied. Nonetheless, with the expanded applications of CrN coatings, the need for enhanced mechanical performance is concurrently escalating. High-power impulse magnetron sputtering (HiPIMS), an innovative coating deposition approach developed over the past three decades, is gaining recognition for its capability of yielding coatings with superior mechanical attributes, thereby drawing significant research interest. Considering that the mechanical performance of a coating is fundamentally governed by its microstructural properties, a comprehensive review of CrN coatings fabricated through both techniques is presented. This review of recent literature aims to embark on an insightful comparison between DCMS and HiPIMS, followed by an examination of the microstructure of CrN coatings fabricated via both techniques. Furthermore, the exploration of the underlying factors contributing to the disparities in mechanical properties observed in CrN coatings is revealed. An assessment of the advantages and potential shortcomings of HiPIMS is discussed, offering insight into CrN coating fabrication.

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“…Theoretically, as deposition temperature increases, the impingement rate of atoms is greater resulting in not only a higher deposition rate of coating but also improve the formation of multilayer coating [10]. According to [11], the CrN coating thickness increases proportionally when deposition temperatures increase from 350 o C -450 o C attributed to active Cr-N ions diffusivity. Pradhan et al [12] investigated the coating performance at 600 o C under an inert atmosphere.…”

Section: Introductionmentioning

confidence: 99%

AlCrN Coated WC by PVD at Various Deposition Temperatures

Rizali

Ling

Latif

et al. 2022

KEM

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An attempt is made in this work to improve the performance and tool life of the tungsten carbide (WC) coated aluminium chromium nitride (AlCrN) via physical vapor deposition (PVD) method. Various deposition temperatures ranging from 250, 350, 400, and 450 oC were investigated to evaluate the characteristic of coated carbide. Prior to the deposition process, WC surfaces were treated in Murakami’s solution for 15 minutes followed by Caro’s solution for 10 seconds to improve the coating adhesion on WC by the dissolution of cobalt (C); roughened the carbide surface. The thickness of the coated AlCrN increases proportional with higher deposition temperatures (from 1.14 μm to 2.18 μm) and homogenously coated. While XRD analysis observed the presence of AlN and CrN phases attributed to AlCrN coating. The hardness of the coated carbide was highest at 450 oC deposition temperature (1325 HV). The qualitative scratch test following ASTM D 3363 indicated that higher temperature (400 oC and above) provides good adhesion characteristics between AlCrN coating and WC.

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Temperature effect on structural, mechanical properties and corrosion behaviour of CrN thin films deposited by magnetron sputtering

Cited by 11 publications

References 40 publications

The effect of sputtering parameters and doping on the properties of CrN‐based coatings—A critical review

The effect of sputtering parameters and doping on the properties of CrN‐based coatings—A critical review

Comparison of CrN Coatings Prepared Using High-Power Impulse Magnetron Sputtering and Direct Current Magnetron Sputtering

AlCrN Coated WC by PVD at Various Deposition Temperatures

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