Temperature-drift characterization of a micromachined resonant accelerometer with a low-noise frequency readout

Fang, Zhengxiang; Yin, Yanlong; He, Xiaofei; Han, Fengtian; Liu, Yunfeng

doi:10.1016/j.sna.2019.111665

Cited by 18 publications

(2 citation statements)

References 21 publications

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“…Fang et al demonstrated the experiment evaluation of a Si-resonant accelerometer, showing an increase in scale factor value to 361 Hz/g with a long term stability of 1.77 µg in a time frame of 30-days under ±0.01 °C controlled temperature variation [173]. Le et al proposed a micro-cantilever based resonant humidity sensor excited by inter-digital transducer technique using AIN/Si layer structure.…”

Section: Recent Progress On Si-mems Resonant Sensorsmentioning

confidence: 99%

Si-based MEMS resonant sensor: A review from microfabrication perspective

Verma

Mondal

Gupta

2021

Microelectronics Journal

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With the technological advancement in micro-electro-mechanical systems (MEMS), microfabrication processes along with digital electronics together have opened novel avenues to the development of small-scale smart sensing devices capable of improved sensitivity with a lower cost of fabrication and relatively small power consumption. This article aims to provide the overview of the recent work carried out on the fabrication methodologies adopted to develop silicon based resonant sensors. A detailed discussion has been carried out to understand critical steps involved in the fabrication of the silicon-based MEMS resonator. Some challenges starting from the materials selection to the final phase of obtaining a compact MEMS resonator device for its fabrication have also been explored critically.

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Section: Recent Progress On Si-mems Resonant Sensorsmentioning

confidence: 99%

Si-based MEMS resonant sensor: A review from microfabrication perspective

Verma

Mondal

Gupta

2021

Microelectronics Journal

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“…A digital frequency readout system based on FPGA counters is designed to solve the problem, and has a 1 sps sampling rate and 25.9 μHz resolution. The resolution of the whole accelerometer is 71.7 ng, and the bias instability is 1.77 μg [ 5 ]. A digital readout circuit based on an AD converter is also designed, whose bias instability can reach 4.3 μg [ 6 ].…”

Section: Introductionmentioning

confidence: 99%

Digital Tri-Axis Accelerometer with X/Y-Axial Resonators and Z-Axial Capacitive Seesaw

Xia

Yao

2022

Micromachines

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A tri-axis accelerometer with a digital readout circuit and communication system is introduced. It is composed of two resonant accelerometers in the x and y-axis, and a seesaw capacitive one in the z-axis. The device is encapsulated in air to ensure that the z-axis works in an over-damped state. Moreover, the closed-loop drive circuit establishes the x-axis and y-axis in resonant mode, and the z-axis in force balance mode. A miniaturized measurement based on FPGA is designed to collect these output signals. The phase noise of the resonance part and the amplitude noise of the seesaw part are studied by simulation. The model can predict the contribution of each part to the measurement error and Allan variance. Multiplied clock and Kalman filter in sliding window are used to reduce the frequency error. The test results show that the accelerometer has low bias instability (<30 μg), low cross-coupling error (<0.5%), and low nonlinearity (<0.1%). The tri-axis digital accelerometer with serial ports is more valuable than the previous works with large commercial instruments.

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