Temperature Dependence on Fin-FET Electrical Parameters for Al2O3 and HfO2 Dielectric Materials: A Comparative Study

Singh, Salini; Roy, Bhaskar; Billaha, Md. Aref; Dutta, Ritam; Choudhary, Santosh Kumar

doi:10.1109/vlsidcs53788.2022.9811493

2022 IEEE VLSI Device Circuit and System (VLSI DCS) 2022

DOI: 10.1109/vlsidcs53788.2022.9811493

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Temperature Dependence on Fin-FET Electrical Parameters for Al₂O₃ and HfO₂ Dielectric Materials: A Comparative Study

Salini Singh

Bhaskar Roy

Md. Aref Billaha³

et al.

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Temperature Dependence on Fin-FET Electrical Parameters for Al₂O₃ and HfO₂ Dielectric Materials: A Comparative Study

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