2010
DOI: 10.1016/j.nimb.2010.05.026
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Temperature dependence of damage formation in Ag ion irradiated 4H-SiC

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Cited by 22 publications
(14 citation statements)
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“…At an ion fluence of N I = 1.4 Â 10 16 cm À2 a significant damage peak occurs which increases in height and broadens slightly during further implantation without reaching the random level for the highest ion fluence applied of 2.6 Â 10 16 cm À2 . Similar spectra were measured also on Ag ion implanted SiC (not shown, see [7]). The damage profiles n da (z) calculated from the spectra in Fig.…”
Section: Experimental Methodssupporting
confidence: 76%
See 1 more Smart Citation
“…At an ion fluence of N I = 1.4 Â 10 16 cm À2 a significant damage peak occurs which increases in height and broadens slightly during further implantation without reaching the random level for the highest ion fluence applied of 2.6 Â 10 16 cm À2 . Similar spectra were measured also on Ag ion implanted SiC (not shown, see [7]). The damage profiles n da (z) calculated from the spectra in Fig.…”
Section: Experimental Methodssupporting
confidence: 76%
“…3 it can be seen that in general the same evolution of damage is found independent whether self-ions or Ag ions are implanted. The damage formation proceeds in two steps which was found to be typical for implantation in semiconductors at temperatures around or above the critical temperature [7,8]. The maximum damage concentration increases at similarly low numbers of displacements per lattice atom, n dpa , for both series of implantation.…”
Section: Resultsmentioning
confidence: 87%
“…At the higher implantation temperature, the displaced substrate atoms have more energy to move around to recombine with vacancies. An analysis of the RBS data show that the damage is a mixture of point defect clusters and extended defects most probably dislocations [115]. This was confirmed by TEM [133].…”
Section: Amorphizationmentioning
confidence: 53%
“…Change in the irradiation temperature may affect the damage creation and recovery rates, as readily demonstrated in strontium titanate (STO), 32 silicon carbide (SiC), 33,34 and some pyrochlores. 35 These materials exhibit very low damage level when irradiated above a threshold temperature whereas they otherwise undergo amorphization.…”
Section: Discussionmentioning
confidence: 99%