2004
DOI: 10.1080/00150190490457735
|View full text |Cite
|
Sign up to set email alerts
|

Temperature Coefficient of SAW Device on SiO2/Proton Exchanged LiNbO3Substrate

Abstract: Proton exchange (PE) is an attractive method for the fabrication of optical and acoustic waveguides in lithium niobate (LiNbO 3 ). LiNbO 3 substrate has large electromechanical coupling coefficient (K 2 ) and moderate SAW velocity, but its temperature coefficient of frequency (TCF) is as large as −73 ppm/ • C. Silicon dioxide (SiO 2 ) is a well-known non-piezoelectric material having the positive TCF for SAW. The SiO 2 thin films are deposited on the PE-LiNbO 3 substrates to improve the TCF of the SAW devices.… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2

Citation Types

1
2
0

Year Published

2006
2006
2022
2022

Publication Types

Select...
3

Relationship

0
3

Authors

Journals

citations
Cited by 3 publications
(3 citation statements)
references
References 9 publications
1
2
0
Order By: Relevance
“…6 at 280–320 K as functions of the number of layers. In the figure, the TCF of the LiNbO 3 crystal without a graphene layer is , which is close to the reported value of 43 . It is clear that the TCFs of zero-, mono-, bi-, and tetra-graphene layer samples are almost the same, but the TCFs of the tri- and penta-layer samples are higher and lower, respectively.…”
Section: Resultssupporting
confidence: 87%
See 1 more Smart Citation
“…6 at 280–320 K as functions of the number of layers. In the figure, the TCF of the LiNbO 3 crystal without a graphene layer is , which is close to the reported value of 43 . It is clear that the TCFs of zero-, mono-, bi-, and tetra-graphene layer samples are almost the same, but the TCFs of the tri- and penta-layer samples are higher and lower, respectively.…”
Section: Resultssupporting
confidence: 87%
“…The thermal coefficient of the fundamental frequency (TCF) of LiNbO 3 crystal is well known as one important parameter of the SAW device. Its value is reported to be near room temperature 43 . The TCF is sensitive to presence of graphene layers because mass accumulation changes the Young’s modulus and mass density of the graphene/LiNbO 3 interface 44 .…”
Section: Resultsmentioning
confidence: 96%
“…1,2) As the substrates, LiNbO 3 and LiTaO 3 have been widely used for surface acoustic wave (SAW) filters because of their excellent piezoelectric properties. 3,4) With the development of frequency agile communications, tunable acoustic filters have received great attention. Compared to semiconductor capacitors, BST capacitors have a higher power capacity, smaller size, and shorter response time.…”
mentioning
confidence: 99%