2010
DOI: 10.4028/www.scientific.net/amr.146-147.1937
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Temperature Coefficient of Resistance (TCR) Measurement Method to Evaluate Metal Process of CMOS Technology

Abstract: Temperature Coefficient of Resistance (TCR) is the important parameter in Electromigration Test of the metal reliability. The physical dimensions of the metallization can be affected by temperature. The coefficient of thermal expansion for a sample of the metallization can be used to approximate its change in volume given and a change in temperature. An object of uniform cross section will have a resistance proportional to its length and inversely proportional to its cross-sectional area, and proportional to t… Show more

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“…Thus, to ensure device performance, α TCR must be considered during their design and monitored during production to avoid losses in efficiency, performance and reliability [1][2][3]. In addition, α TCR can be used as an indirect measure of critical dimension [4], and as an early warning indicator of thermal failure [5,6].…”
Section: Introductionmentioning
confidence: 99%
“…Thus, to ensure device performance, α TCR must be considered during their design and monitored during production to avoid losses in efficiency, performance and reliability [1][2][3]. In addition, α TCR can be used as an indirect measure of critical dimension [4], and as an early warning indicator of thermal failure [5,6].…”
Section: Introductionmentioning
confidence: 99%