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2013
DOI: 10.1002/pssr.201307116
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Tellurium delta‐doped InGaP layers grown by metalorganic vapour phase epitaxy

Abstract: Heavily n‐type doped and several nanometres thick In0.485Ga0.515P layers are necessary for various devices. We studied the delta‐doping of this ternary with tellurium; the layers were grown by metalorganic vapour phase epitaxy (MOVPE), and diethyltelluride was used as the precursor. A maximum Hall sheet concentration of 2.75 × 1013 cm–2 was achieved in our samples grown at 560 °C. The Te profiles were analyzed with secondary ion mass spectrometry (SIMS), and a very narrow spectrum with a full width at half max… Show more

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