Television Pickup Tubes Using Low-Velocity Electron-Beam Scanning

Rose, Albert; Iams, H.

doi:10.1109/jrproc.1939.228710

Cited by 18 publications

(2 citation statements)

References 3 publications

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“…This is because the early television and the SEM are both closely related technologically in that they were both scanned electron beam systems. Especially notable was the work at RCA Laboratories [10 - 12]. Aspects of that research were directly applicable to the early SEM instruments such as the ones developed by Zworykin, Hillier and Snyder [13] and those at Cambridge University [14 – 15] that ultimately led to the first commercial SEM instruments.…”

Section: 0 Discussionmentioning

confidence: 99%

Does your SEM really tell the truth? How would you know? Part 4: Charging and its mitigation

Postek

Vladár

2015

SPIE Proceedings

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This is the fourth part of a series of tutorial papers discussing various causes of measurement uncertainty in scanned particle beam instruments, and some of the solutions researched and developed at NIST and other research institutions. Scanned particle beam instruments, especially the scanning electron microscope (SEM), have gone through tremendous evolution to become indispensable tools for many and diverse scientifc and industrial applications. These improvements have significantly enhanced their performance and made them far easier to operate. But, the ease of operation has also fostered operator complacency. In addition, the user-friendliness has reduced the apparent need for extensive operator training. Unfortunately, this has led to the idea that the SEM is just another expensive “digital camera” or another peripheral device connected to a computer and that all of the problems in obtaining good quality images and data have been solved. Hence, one using these instruments may be lulled into thinking that all of the potential pitfalls have been fully eliminated and believing that, everything one sees on the micrograph is always correct. But, as described in this and the earlier papers, this may not be the case. Care must always be taken when reliable quantitative data are being sought. The first paper in this series discussed some of the issues related to signal generation in the SEM, including instrument calibration, electron beam-sample interactions and the need for physics-based modeling to understand the actual image formation mechanisms to properly interpret SEM images. The second paper has discussed another major issue confronting the microscopist: specimen contamination and methods to eliminate it. The third paper discussed mechanical vibration and stage drift and some useful solutions to mitigate the problems caused by them, and here, in this the fourth contribution, the issues related to specimen “charging” and its mitigation are discussed relative to dimensional metrology.

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Section: 0 Discussionmentioning

confidence: 99%

Does your SEM really tell the truth? How would you know? Part 4: Charging and its mitigation

Postek

Vladár

2015

SPIE Proceedings

View full text Add to dashboard Cite

show abstract

“…This is because the early television and the SEM are both closely related in that they were both scanned electron beam systems. Especially notable was the work at RCA Laboratories [6-8]. Aspects of that research were directly applicable to the early SEM instruments such as the ones developed by Zworykin, Hillier and Snyder [9] and those at Cambridge University [10 – 11] that ultimately led to the first commercial SEM instruments.…”

Section: 0 Discussionmentioning

confidence: 99%

Nanomanufacturing concerns about measurements made in the SEM part IV: charging and its mitigation

Postek

Vladár

2015

SPIE Proceedings

View full text Add to dashboard Cite

This is the fourth part of a series of tutorial papers discussing various causes of measurement uncertainty in scanned particle beam instruments, and some of the solutions researched and developed at NIST and other research institutions. Scanned particle beam instruments especially the scanning electron microscope (SEM) have gone through tremendous evolution to become indispensable tools for many and diverse scientific and industrial applications. These improvements have significantly enhanced their performance and made them far easier to operate. But, the ease of operation has also fostered operator complacency. In addition, the user-friendliness has reduced the apparent need for extensive operator training. Unfortunately, this has led to the idea that the SEM is just another expensive “digital camera” or another peripheral device connected to a computer and that all of the problems in obtaining good quality images and data have been solved. Hence, one using these instruments may be lulled into thinking that all of the potential pitfalls have been fully eliminated and believing that, everything one sees on the micrograph is always correct. But, as described in this and the earlier papers, this may not be the case. Care must always be taken when reliable quantitative data are being sought. The first paper in this series discussed some of the issues related to signal generation in the SEM, including instrument calibration, electron beam-sample interactions and the need for physics-based modeling to understand the actual image formation mechanisms to properly interpret SEM images. The second paper has discussed another major issue confronting the microscopist: specimen contamination and methods to eliminate it. The third paper discussed mechanical vibration and stage drift and some useful solutions to mitigate the problems caused by them, and here, in this the fourth contribution, the issues related to specimen “charging” and its mitigation are discussed relative to dimensional metrology.

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Die Photozelle in der Fernsehtechnik

Eckart¹

1958

Der Lichtelektrische Effekt Und Seine Anwendungen

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Television Pickup Tubes Using Low-Velocity Electron-Beam Scanning

Cited by 18 publications

References 3 publications

Does your SEM really tell the truth? How would you know? Part 4: Charging and its mitigation

Does your SEM really tell the truth? How would you know? Part 4: Charging and its mitigation

Nanomanufacturing concerns about measurements made in the SEM part IV: charging and its mitigation

Die Photozelle in der Fernsehtechnik

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