Thickness measurement in a horizontal liquid layer when heated from a localized hot-spot S E Spesivtsev, Yu V Lyulin, I V Marchuk et al. Thickness measurements of coatings formed from metal plasma of a vacuum arc discharge using X-ray radiation Abstract. Using vacuum arc plasma sources allows obtaining coatings with broad spectrum of functional properties. The main problem is to control the thickness of a formed coating. This paper shows the possibility of using X-ray radiation to determine the coating thickness.Currently a wide range of various by composition coatings deposited from metal plasma of a vacuum arc discharge is developed and applied [1,2]. Universal properties of the formed coatings allow their use in various branches of engineering to improve wear resistance, reduce coefficient of friction and provide protection from corrosion [3,4]. To meet market requirements the coating must provide a sufficient hardness, low friction coefficient and high thermal stability. The solution to this problem is achieved either by the development of new coating formulations with enhanced performance properties, or by developing new methods of coating deposition to improve the coating quality and increase the speed of its formation. To achieve this goal vacuum arc plasma sources are very widely used [5]. Modifying parameters of a generated flux of metal plasma, the pressure of the reaction gas and the magnitude of the accompanying magnetic field, it is possible to control the properties of condensate and to obtain the necessary coating quality. In vacuum arc plasma sources with coaxial design of the electrodes the cathode is made in a form of a cylinder or truncated cone, the working surface in this case is the side with the smallest area S c (figure 1). Section of the cathode opposite to its working surface is cooled with running water. Continuous chaotic movement of cathode spots at a fixed surface of the cathode [6], regardless of the initial distribution, leads to some average equilibrium temperature of the surface, determined by the geometrical dimensions of the cathode: the diameter and length, and conditions of its cooling.Diameter of the working surface of the cathode may be as much as 200 mm. Geometric dimensions are selected to provide lowest average operating temperature of the cathode. During the work of the source due to erosion of the material the length of the cathode decreases (figure 1) that leads to a decrease in temperature of the cathode and to changes in the conditions of plasma flow formation.Thus, the temperature of the cathode is the main factor determining modes of generation of the plasma flux, and therefore, even providing the stabilization of the discharge parameters, as the cathode is sputtered, there are significant changes in it leading to deviations of thickness of the formed coatings. In batch deposition of coatings these conditions require adjustments to the process.