Technology and application оf electrochemical motion sensors

Abstract

In this paper, we consider technology and application of electrochemical transducers (ECT). Electrochemical systems are very promising for the development of a new element base for microelectronics. One of the most important directions is the design of micro-sized electrochemical acceleration and pressure sensors, and one of the most promising technologies is electrochemical transfer. Electrochemical transducers are very sensitive and energy-efficient and best suited for measuring weak mechanical movements. The basic principle consist in the following: microelectrodes are formed on a silicon chip and the chip is placed in a container with liquid electrolyte. Under the influence of an external mechanical signal, the electrolyte liquid starts moving (by inertia or by pressure) and transfers ions between the electrodes. The generated electric current is proportional to the external mechanical signal. We have developed a new microelectronic technology for electrochemical transducers, and have designed new instruments based on new electrochemical microelectronic chips. Currently, ECTs are applied for a variety of engineering tasks. ECTs are used to record the ground oscillation in the railway, in the tsunami early warning system, in electrochemical hydrophones for sea-bottom stations and for geoexploration systems, in the precise azimuth determination inertial systems.

Modeling of the MET Sensitive Element Conversion Factor on the Intercathode Distance

“…In [ 21 ], the linearity of the signal conversion in relation to the intercathode distance was studied and nonlinear effects were shown to decrease with the decreasing distance. In addition, note that, from the known variety of configurations of the converting element, planar systems are of the most interest, as the electrodes in them are placed on the channels walls [ 19 , 22 , 23 , 24 , 25 ] due to the simplicity of manufacture and wide possibilities for selecting the converter geometry to achieve optimal output characteristics.…”

Influence of the Dielectric Coating of the Outer Side of the Cathode in the Anode–Cathode Pairs of a Molecular Electronic Sensitive Element on the Conversion Coefficient

“…The success achieved in the technical characteristics and understanding of the broad commercial prospects of this direction, prompted researchers from around the world to develop technological solutions based on using precision methods of microfabrication, such as microelectronic fabrication and/or laser drilling [ 4 , 17 , 18 , 19 , 20 ], which reduce the scatter of parameters of sensitive elements, reduce their cost and prepare them for mass production. The first results related to the use of microelectronic technologies were published in 2012–2013 by research groups from Moscow Institute of Physics and Technology [ 21 ], Arizona State University [ 22 ] and the Institute of Electronics CAS [ 3 , 23 , 24 ].…”

“…In this case, the technological processes of oxidation in a diffusion furnace [ 21 ], explosive photolithography and electron–beam deposition [ 21 , 22 ], laser cutting [ 3 , 21 , 24 ], low-pressure chemical vapor deposited (LPCVD) [ 22 ], plasma-enhanced chemical vapor deposited (PECVD) [ 22 ], focused ion beam (FIB) [ 22 ], deep reactive ion etching (DRIE) [ 3 ], [ 22 ] were used. Over the next 10 years, these technologies were significantly developed and, nowadays, we can discuss the presence of several tested different solutions, which make it possible to successfully manufacture conversion elements with high sensitivity and good repeatability [ 4 , 17 , 18 , 19 , 20 ].…”