Technological Approaches to the Microfabrication of Planar Slow-Wave Structures for Millimeter- and THz-Band Vacuum Electron Devices

Starodubov, A. V.; Serdobintsev, Alexey A.; Galkin, Alexander; Галушка, В. В.; Torgashov, Roman A.; Bessonov, D. A.; Pavlov, Anton M.; Rozhnev, A. G.; Torgashov, G.V.; Kozhevnikov, Ilya O.; Sakharov, V. K.; Ryskin, Nikita M.; Rasulov, Ilya

doi:10.1109/apede48864.2020.9255610

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Technological Approaches to the Microfabrication of Planar Slow-Wave Structures for Millimeter- and THz-Band Vacuum Electron Devices

Cited by 11 publications

References 47 publications

Prototyping of electromagnetic components of sub-terahertz vacuum electron devices

Prototyping of electromagnetic components of sub-terahertz vacuum electron devices

Investigation of Transit Channel Influence on Rectangular Chain of Coupled Cavities Slow-Wave Structure

Improved Laser Microprocessing of 2D Planar Microstrip Slow-Wave Structures for Millimeter-Band Vacuum Microelectronic Devices

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