2006
DOI: 10.1116/1.2387158
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Technique to automatically measure electron-beam diameter and astigmatism:BEAMETR

Abstract: Variable axis lens of mixed electrostatic and magnetic fields and its application in electron-beam lithography systems J.Accuracy and resolution of scanning electron microscopy and an electron-beam lithography system directly depend on beam diameter; it should be monitored and tuned frequently. A technique is described to determine beam size using an automatic procedure. In the developed method, a specially designed and fabricated test pattern is scanned using an e-beam. A spectrum of the signal is analyzed; b… Show more

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Cited by 24 publications
(28 citation statements)
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“…The widespread use of SEM became possible after 1958, when researchers from Cambridge (UK) built the first commercial prototype [13]. The typical primary electron beam used in a SEM is of 1-30 kV, with a beam current of 1 pA to 20 nA that can be focused in about 2-100-nm spot size, depending on the emitter source [14,15]. A detailed description of the SEM operation can be found in [16].…”
Section: Scanning Electron Microscopy (Sem)mentioning
confidence: 99%
“…The widespread use of SEM became possible after 1958, when researchers from Cambridge (UK) built the first commercial prototype [13]. The typical primary electron beam used in a SEM is of 1-30 kV, with a beam current of 1 pA to 20 nA that can be focused in about 2-100-nm spot size, depending on the emitter source [14,15]. A detailed description of the SEM operation can be found in [16].…”
Section: Scanning Electron Microscopy (Sem)mentioning
confidence: 99%
“…This method generally works for probe sizes down to a few nanometer, [Ris84 Kra88] although it has potential sources of error. [Bab06] A different method is using a point projection microscope, [Jon04 Fra96] but to extract a size from the experimental Fresnel fringes patterns one has to assume the shape of the source intensity distribution. Also Fourier methods have been applied, [Joy02] but a routine that can deal with unknown probe shapes is still under development.…”
Section: How To Get the Practical Brightness Of A Sourcementioning
confidence: 99%
“…The test sample consists of a piece of silicon containing a nanoscale pattern with a known spatial frequency spectrum. Because the spatial frequency spectrum of a recorded image is a function of the beam diameter, a mathematical algorithm can be used to extract the beam diameter from an SEM image of the test pattern (Babin et al, 2006). Monte Carlo simulations using the Casino 2.42 software (Hovington et al, 1997;Drouin et al, 2007) were then performed to determine the size and shape of the X-ray emission volume within the brass target.…”
Section: Sem Imaging Edx Analysis and Resolution Testmentioning
confidence: 99%