2021 International Semiconductor Conference (CAS) 2021
DOI: 10.1109/cas52836.2021.9604133
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TCAD study of latch-up sensitivity to wafer thinning below 500 nm

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Cited by 2 publications
(1 citation statement)
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“…From a circuit-level hardness perspective, the devices will exit the SEL when the latch-up currents or latch-up voltages fall below the holding currents or voltages. To improve the SEL immunity of CMOS devices, three dominant research directions are proposed, respectively process-level hardness, layout-level hardness, and circuit-level hardness [18][19][20]. Both process-level and layout-level designs enable the devices to be protected from SEL, while neither is applicable to commercial devices that have already been designed for production [21][22][23].…”
Section: Introductionmentioning
confidence: 99%
“…From a circuit-level hardness perspective, the devices will exit the SEL when the latch-up currents or latch-up voltages fall below the holding currents or voltages. To improve the SEL immunity of CMOS devices, three dominant research directions are proposed, respectively process-level hardness, layout-level hardness, and circuit-level hardness [18][19][20]. Both process-level and layout-level designs enable the devices to be protected from SEL, while neither is applicable to commercial devices that have already been designed for production [21][22][23].…”
Section: Introductionmentioning
confidence: 99%