Thin Solid Films
 2020
DOI: 10.1016/j.tsf.2020.137917
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Target power influence on optical and electrical properties of amorphous titanium oxide deposited by reactive grid-assisted magnetron sputtering

R.S. Santiago
1
,
L.C.D. Silva
2
,
Fábio Dondeo Origo
3
et al.
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Cited by 8 publications
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