2004
DOI: 10.1117/2.5200402.0009
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Taking the LED Challenge

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“…Some of the major advancements of SEMs in recent years have been (a) increases in resolution, especially at low electron landing energies [2]; (b) improvements in usability through digitalization, advances in software and tool handling, or miniaturization [3]; (c) addition of improved detection schemes such as energy-or wavelength-dispersive X-ray spectrometry (EDX, WDX) to maximize the amount of information that can be taken from the sample [4]; and (d) combinations of electron microscopy with other microscopic techniques for correlative microscopy [5][6][7][8][9]. SEMs have become ubiquitous tools that are used in various environments and for many different applications; they no longer require highly specialized operators.…”
Section: Introductionmentioning
confidence: 99%
“…Some of the major advancements of SEMs in recent years have been (a) increases in resolution, especially at low electron landing energies [2]; (b) improvements in usability through digitalization, advances in software and tool handling, or miniaturization [3]; (c) addition of improved detection schemes such as energy-or wavelength-dispersive X-ray spectrometry (EDX, WDX) to maximize the amount of information that can be taken from the sample [4]; and (d) combinations of electron microscopy with other microscopic techniques for correlative microscopy [5][6][7][8][9]. SEMs have become ubiquitous tools that are used in various environments and for many different applications; they no longer require highly specialized operators.…”
Section: Introductionmentioning
confidence: 99%