2021
DOI: 10.1002/pssa.202100148
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Tailoring the Surface Characteristics of CuSe Thin Films by Adjusting the Compositional Ratio

Abstract: Using radio frequency (RF) magnetron cosputtering, copper selenide thin films (TFs) with various ratios of Se are fabricated herein. To observe how the chemical and physical properties change based on morphology, the ratio of metallic Cu to nonmetallic Se is tuned to form multiple different compositions. The compositional percentage of the surface is determined by X‐ray photoelectron spectroscopy (XPS). Noticeable transitions of the characteristics of TFs are affected by Cu to a higher degree than Se. Larger g… Show more

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Cited by 6 publications
(1 citation statement)
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References 53 publications
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“…SnTe TFs were fabricated by depositing target materials on Si(100) substrates using a homemade RF magnetron cosputtering system. [25][26][27] Fabrication of TFs was performed in the cosputtering chamber. The base pressure of the cosputtering chamber was maintained at 2.4 Â 10 À2 Pa using two rotary pumps (RPs) and a turbo molecular pump (TMP).…”
Section: Fabrication Methods Of Tin Telluride Thin Filmsmentioning
confidence: 99%
“…SnTe TFs were fabricated by depositing target materials on Si(100) substrates using a homemade RF magnetron cosputtering system. [25][26][27] Fabrication of TFs was performed in the cosputtering chamber. The base pressure of the cosputtering chamber was maintained at 2.4 Â 10 À2 Pa using two rotary pumps (RPs) and a turbo molecular pump (TMP).…”
Section: Fabrication Methods Of Tin Telluride Thin Filmsmentioning
confidence: 99%