2018
DOI: 10.1016/j.carbon.2018.03.005
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Tailoring stress in pyrolytic carbon for fabrication of nanomechanical string resonators

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Cited by 14 publications
(11 citation statements)
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“…The structural change can be a part of relaxation of residual stress that develops within pyrolytic carbon derived from photoresist resins. [ 64 ] When sodium ions are inserted and consequently extracted, the microstructure of hard carbon could rearrange to relieve the residual stress, compacting the interlayer distance. There was another peak that appeared at 28° which continued growing until the discharging ended at 0.001 V. The intensity of this peak was lowered along with charging, yet did not completely fade at 2.0 V. A past publication reported a similar finding and attributed it to formation of an intercalation compound (NaCx).…”
Section: Resultsmentioning
confidence: 99%
“…The structural change can be a part of relaxation of residual stress that develops within pyrolytic carbon derived from photoresist resins. [ 64 ] When sodium ions are inserted and consequently extracted, the microstructure of hard carbon could rearrange to relieve the residual stress, compacting the interlayer distance. There was another peak that appeared at 28° which continued growing until the discharging ended at 0.001 V. The intensity of this peak was lowered along with charging, yet did not completely fade at 2.0 V. A past publication reported a similar finding and attributed it to formation of an intercalation compound (NaCx).…”
Section: Resultsmentioning
confidence: 99%
“…For resonators pyrolysed at 1100 °C, the resistances were lower [Supporting Information S1]. However, for these structures, buckling due to compressive stress was observed 32 . In conclusion, the resonators fabricated at 900 °C had resistances in the kΩ range and were deemed suitable for resistive heating.…”
Section: Resultsmentioning
confidence: 99%
“…The thermal analysis of the polymers was based on resonance frequency measurements of the pyrolytic carbon resonators. The resonance frequency was tracked using a commercial MSA-500 laser Doppler vibrometer from Polytec and an HF2LI lock-in amplifier from Zurich Instruments as previously described 32 . For temperature calibration, external heating was used, and the chip with the pyrolytic carbon resonators was placed on top of a Peltier element.…”
Section: Methodsmentioning
confidence: 99%
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“…On the one hand, the Joule heating process annealed the pre-existing critical flaws, preventing failure significantly below the average strength. On the other hand, it relieved the compressive residual stresses caused by the pyrolysis of the photoresists 68 , which can prevent crack propagation, and introduced surface defects, thus reducing the highest strengths recorded for as-pyrolyzed lattices. Therefore, the porous sheath is believed to contribute to the narrow deviation of compressive strength, suggesting surface nanoporosity as the preferred location where brittle failure is triggered.…”
mentioning
confidence: 99%