Advances in Resist Technology and Processing XIV 1997
DOI: 10.1117/12.275905
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Tailoring of novolac resins for photoresist applications using a two-step synthesis procedure

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Cited by 9 publications
(14 citation statements)
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“…7 Because the percentage of different precursors in the novolac microstructure is also very critical for good pattern formation, it is increasingly realized that the conventional "one-pot" synthesis of novolac resin should be replaced by a two-step procedure to tailor the growth of the polymer chain. 8 To elucidate the exact microstructure of these polymers, NMR turns out to be the most useful and unambiguous characterization tool. 9,10 In this study, we have demonstrated a methodology for the synthesis of a new series of CNSL/cardanolbased "high ortho" novolac copolymers and have used GPC and both 1-D and 2-D NMR spectroscopic techniques to elucidate their exact microstructure and to calculate the percentage incorporation of different monomers in the polymer microstructure.…”
Section: Introductionmentioning
confidence: 99%
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“…7 Because the percentage of different precursors in the novolac microstructure is also very critical for good pattern formation, it is increasingly realized that the conventional "one-pot" synthesis of novolac resin should be replaced by a two-step procedure to tailor the growth of the polymer chain. 8 To elucidate the exact microstructure of these polymers, NMR turns out to be the most useful and unambiguous characterization tool. 9,10 In this study, we have demonstrated a methodology for the synthesis of a new series of CNSL/cardanolbased "high ortho" novolac copolymers and have used GPC and both 1-D and 2-D NMR spectroscopic techniques to elucidate their exact microstructure and to calculate the percentage incorporation of different monomers in the polymer microstructure.…”
Section: Introductionmentioning
confidence: 99%
“…The reaction time was found to be sufficient to consume almost all (95%) the formalin solution. 8 The second cresolic precursor (designated as "II" in Table I) was then added to the first cresolic monomer in a 1 : 1 ratio. The mixture was diluted with hydrochloric acid (1 : 1) in an ice bath and the pH was lowered to 4 -4.5.…”
Section: Introductionmentioning
confidence: 99%
“…15,16 In the first step, the first cresolic monomer (cardanol) was mixed with formaldehyde (37%) and sodium hydroxide in the ratio 1 : 2.2 : 1. The mixture was stirred mechanically at room temperature (258C) for 48 h. The second cresolic precursor (m-cresol) was then added to the first cresolic monomer in 1 : 1 ratio.…”
Section: Methodsmentioning
confidence: 99%
“…5 In the first step, p-cresol was mixed with formaldehyde and a base (NaOH) at room temperature and kept for 48 h. In the second step, the bishydroxymethylated p-cresol was allowed to react with twice the amount of m-cresol at an elevated temperature (140 -150°C) for 1 h in the presence of acidic catalysts. The polymer was then subjected to steam distillation and reprecipitated from ethyl acetate and hexane.…”
Section: Methodsmentioning
confidence: 99%