Abstract:We demonstrate that the state-of-the-art postirradiation technology for negatively charged oxygen (O−) ions is effective for tailoring carrier concentration (n
e
), electrical resistivity (ρ), and optical band gap (E
g) in a wide range for polycrystalline 50-nm-thick Sn-doped In2O3 (ITO) films on glass substrates by reactive plasma deposition with direct-current arc discharge. As-deposited ITO films showed n
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