Tailoring Crystalline Structure of Titanium Oxide Films for Optical Applications Using Non-Biased Filtered Cathodic Vacuum Arc Deposition at Room Temperature
Elena Guillén,
Matthias Krause,
Irene Heras
et al.
Abstract:Titanium oxide films were deposited at room temperature and with no applied bias using a filtered cathodic vacuum arc (FCVA) system in a reactive oxygen environment. The dependence of film growth on two process parameters, the working pressure (Pw) and the O2 partial pressure (pO2), is described in detail. The composition, morphological features, crystalline structure, and optical properties of the deposited films were systematically studied by Rutherford Back Scattering (RBS), Scanning Electron Microscopy (SE… Show more
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