2016
DOI: 10.1063/1.4960386
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Tailored probes for atomic force microscopy fabricated by two-photon polymerization

Abstract: 3D direct laser writing based on two-photon polymerization is considered as a tool to fabricate tailored probes for atomic force microscopy. Tips with radii of 25 nm and arbitrary shape are attached to conventionally shaped micro-machined cantilevers. Long-term scanning measurements reveal low wear rates and demonstrate the reliability of such tips. Furthermore, we show that the resonance spectrum of the probe can be tuned for multi-frequency applications by adding rebar structures to the cantilever.

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Cited by 35 publications
(26 citation statements)
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“…In the jet-printing configuration of patterning with FluidFM probes the features patterned were at least three times thicker than the opening diameter The technique outlined is capable of deposition of more complex 3D structures, which can be used further for optical and nanomechanical applications, as unconventional SPM probes and in nanoelectronic devices as interconnects. 1,[55][56][57] Figure 4a shows two freestanding 25 m and 27 m -tall zigzag features (both structures are 500 nm thick). These structures were grown by the deposition of a vertical pillar (3 m in height), followed by the copper electroplating with a laterally translated nanopipette at a rate of 50 nm s -1 , which allowed the construction of a metal wire in a diagonal configuration, with each diagonal inclined at about 60 degrees with respect to the substrate.…”
Section: Operational Principlementioning
confidence: 99%
“…In the jet-printing configuration of patterning with FluidFM probes the features patterned were at least three times thicker than the opening diameter The technique outlined is capable of deposition of more complex 3D structures, which can be used further for optical and nanomechanical applications, as unconventional SPM probes and in nanoelectronic devices as interconnects. 1,[55][56][57] Figure 4a shows two freestanding 25 m and 27 m -tall zigzag features (both structures are 500 nm thick). These structures were grown by the deposition of a vertical pillar (3 m in height), followed by the copper electroplating with a laterally translated nanopipette at a rate of 50 nm s -1 , which allowed the construction of a metal wire in a diagonal configuration, with each diagonal inclined at about 60 degrees with respect to the substrate.…”
Section: Operational Principlementioning
confidence: 99%
“…Available nanoindenter tips may reach nowadays radii as small as R = 10 nm [96,97]. Indeed most simulations have been performed for spherical tips, and occasionally for conospherical tips.…”
Section: Tip Geometrymentioning
confidence: 99%
“…The advent of nanoindentation testing has given greater meaning to such probe capability. Emphasis was given previously in [4] to connection with probe aspects of atomic force microscopy for which a new tip fabrication procedure has recently been reported [39]. Another recent application has been to investigate the strain hardening surrounding Figure 6.…”
Section: Hardness As a Test Probementioning
confidence: 99%