Perovskite
solar cells (PSCs), which have surprisingly emerged in recent years,
are now aiming at commercialization. Rapid, low-temperature, and continuous
fabrication processes that can produce high-efficiency PSCs with a
reduced fabrication cost and shortened energy payback time are important
challenges on the way to commercialization. Herein, we report a reactive
ion etching (RIE) method, which is an ultrafast room-temperature technique,
to fabricate mesoporous TiO2 (mp-TiO2) as an
electron transport layer for high-efficiency PSCs. Replacing the conventional
high-temperature annealing process by RIE reduces the total processing
time for fabricating 20 PSCs by 40%. Additionally, the RIE-processed
mp-TiO2 exhibits enhanced electron extraction, whereupon
the optimized RIE-mp-TiO2-based PSC exhibits a power conversion
efficiency (PCE) of 19.60% without J–V hysteresis, when the devices were optimized with a TiCl4 surface treatment process. Finally, a flexible PSC employing
RIE-mp-TiO2 is demonstrated with 17.29% PCE. Considering
that the RIE process has been actively used in the semiconductor industry,
including for the fabrication of silicon photovoltaic modules, the
process developed in this work could be easily applied toward faster,
simpler, and cheaper manufacturing of PSC modules.