T1601-1-4 Fabrication and characterization of narrow-gapped silicon dual nano probe for atomic force microscope

Umino, Akihiro; Morita, Shinji; Matsukawa, Takashi; Makino, Eiji; Kawashima, Takahiro; Shibata, Takayuki

doi:10.1299/jsmemecjo.2009.8.0_239

Cited by 2 publications

(4 citation statements)

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“…Anisotropic etching was next performed on the exposed Si surface to form a tip normal to the Si (111) plane ( Fig. 3(d-1) [2][3][4][5][6]. Finally, the SOG was removed by wet etching to separate the tip ( Fig.…”

Section: Fabrication Of Narrow-gapped Dual Afm Cantilevermentioning

confidence: 99%

“…But it is difficult to achieve high‐resolution observation with a tip that was previously used for cutting, and thus is worn by friction and contaminated with molecules. Consequently, we developed dual AFM cantilevers provided with two separate probes, one for cutting and another for observation . We previously formed thermal oxide films to protect the trenches on a monocrystalline Si substrate, then refilled the trenches with resin, exposed Si on the substrate surface by mechanical polishing with alumina abrasive grit, and created dual probes with a gap of about 400 nm by crystalline anisotropic etching.…”

Section: Introductionmentioning

confidence: 99%

“…In addition, we previously developed an Au/Cr thin‐film thermal actuator to implement vertical movement for switching between dual AFM tips; however, there was a problem of thermal interference between the cantilevers .…”

Section: Introductionmentioning

confidence: 99%

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Self‐Align Fabrication of Narrow‐Gapped Dual AFM Tip Using Si Trench Refilling with SOG and Magnetostrictive Film Stacked Dual Cantilever Formation

Matsukawa

Makino

Kawashima

et al. 2015

Elect Comm in Japan

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SUMMARYThis paper reports on a novel self-align fabrication process of narrow-gapped dual AFM (atomic force microscope) tip. The dual AFM tip was fabricated on (100) orientated Si substrate by using narrow trench etching, trench refilling with SOG (spin-on-glass), CMP (chemicalmechanical polishing), and Si crystalline anisotropic etching. Through the process, a sharp dual AFM tip with a gap of 500 nm, which was defined only by the etched trench width, was successfully fabricated. Although another fabrication process using an acrylic-nitrile-styrene-epoxy resin refilling was also attempted, a dual tip was not obtained due to the poor adhesion of the resin in the silicon etching process. In addition, a dual AFM cantilever (magnetostrictive film/Si 2.0 μm) was formed by MEMS fabrication. The fabricated FePd 0.4 μm/Si 2.0 μm and Ni 1.3 μm/Si 2.0 μm cantilever were individually deflected to 1.4 μm at 300 Gauss and 0.4 μm at 240 Gauss due to effects of magnetic flux and negative magnetostriction, respectively. C⃝ 2015 Wiley Periodicals, Inc. Electron Comm Jpn, 98(12): 30-36, 2015; Published online in Wiley Online Library (wileyonlinelibrary.com).

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Section: Fabrication Of Narrow-gapped Dual Afm Cantilevermentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Self‐Align Fabrication of Narrow‐Gapped Dual AFM Tip Using Si Trench Refilling with SOG and Magnetostrictive Film Stacked Dual Cantilever Formation

Matsukawa

Makino

Kawashima

et al. 2015

Elect Comm in Japan

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“…To realize in-situ imaging with high resolution after the molecular operations such as cutting, we have developed dual AFM probes which have individual nano-tips on each cantilever in order to divide the role of cutting and imaging. The concept and typical structure of the dual AFM are shown in Fig.3 [5,[15][16][17][18].…”

Section: Introductionmentioning

confidence: 99%

Dual AFM probe for imaging and in-situ mechanical operation

Matsukawa

2014

2014 IEEE International Nanoelectronics Conference (INEC)

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This paper reviews the progress of nano-machined dual AFM probes which have functions of molecular imaging and in-situ mechanical operation. Fabrication techniques based on self-align Si etching process provided twin AFM tips with narrow gap, which minimize the offset calibration while switching from one probe to another. Dual cantilevers with thermal and magneto-strictive thin film actuators have also been developed for individual vertical deflection control for switching the two probes. Since demands to mechanical measurements and operations have been increased in biological applications, we anticipate these new techniques to contribute in fundamental biology studies in molecular level.

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T1601-1-4 Fabrication and characterization of narrow-gapped silicon dual nano probe for atomic force microscope

Cited by 2 publications

References 0 publications

Self‐Align Fabrication of Narrow‐Gapped Dual AFM Tip Using Si Trench Refilling with SOG and Magnetostrictive Film Stacked Dual Cantilever Formation

Self‐Align Fabrication of Narrow‐Gapped Dual AFM Tip Using Si Trench Refilling with SOG and Magnetostrictive Film Stacked Dual Cantilever Formation

Dual AFM probe for imaging and in-situ mechanical operation

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