Systematics of thin films formed by excimer laser ablation: Results on SmBa2Cu3O7

Neifeld, R. A.; Gunapala, Sarath D.; Liang, Chi Wei; Shaheen, S. A.; Croft, Mark; Price, J. L.; Simons, David S.; Hill, W. T.

doi:10.1063/1.100646

Cited by 64 publications

(18 citation statements)

References 6 publications

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“…Preparation of high T< superconducting thin films using laser ablation method is vigorously being pursued in many laboratories (Dijkkamp et at 1987; Moorjani et al 1987; Lynds et al 1988; Fogarassy et at 1988; Neifeld et al 1988). In order to deposit good-quality films which are superconducting, one has to control rather promptly the parameters of the laser-generated plasma.…”

Section: T Introductionmentioning

confidence: 99%

Characteristics of laser-induced plasma from highT c superconductor

et al. 1991

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AiJsIract. The spectroscopic analysis of the emission from the plasma produced by irradiating a high T, superconducting GdBa z Cu)07 target with a high power Nd: Y AG laser beam shows the existence of the bands from dilTerent oxides in addition to the lines from neutrals and ions of the constituent elements. The spectral emissions by oxide species in laser-induced plasma show considerable time delays as compared to those from neutral and ionic species. Recombination processes taking place during the cooling of the hot plasma.rather than the plasma expansion velocities, have been found to be responsible for the observed time delays in this case. The decays of emission intensities from various species are found to be non-exponential.

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Section: T Introductionmentioning

confidence: 99%

Characteristics of laser-induced plasma from highT c superconductor

et al. 1991

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“…These ablated species form a plasma plume containing mixture of atoms, molecules, electrons, and ions (Chrisey & Hubler, 1994;Doggett & Lunney, 2009;Lenk et al, 1996;Merlino, 2007;Singh & Narayan, 1990;Zheng et al, 1989;Wood & Giles, 1981;Caridi et al, 2008). The plasma plume expands with supersonic velocity (Singh & Narayan, 1989) and its parameters such as plasma temperature, ion density, electron density, electron temperature vary with laser parameters such as frequency, energy irradiance as well as on the background pressure (Inam et al, 1987;Neifeld et al, 1988). The laser produced plasma is highly transient in nature and its parameters vary in both space and time.…”

Section: Introductionmentioning

confidence: 98%

Plasma plume behavior of laser ablated cerium oxide: Effect of oxygen partial pressure

et al. 2014

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This paper describes the spatial and temporal investigation of laser ablated plasma plume of cerium oxide target using Langmuir probe. Cerium oxide target was ablated using a KrF (λ~248 nm) gas laser. Experimental studies confirmed that oxygen partial pressure of 2 × 10 −2 mbar is sufficient enough to get good quality films of cerium oxide. At this pressure, plume was diagnosed for their spatial and temporal behavior. Spatial distribution was investigated at a distance of 15 mm, 30 mm, and up to a maximum distance of 45 mm from the target, whereas temporal behavior has been recorded in the range of 0 to 50 μS with an interval of 0.5 μS. The average electron densities are found to be maximum at 30 mm from the target position and the plasma current of the laser ablated ceria is found to be maximum at 22 μS.

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“…The surface roughness is one of the interesting problems in the film physics and technology. Studies on the composition [5], crystal structure [8] and grain size [9] of the laser-ablated films have been examined, while a report concerning the nanoscale surface roughness has not been made to date.…”

mentioning

confidence: 99%

“…The laser ablation method has been developed for the preparation of thin films of superconductors [1,2], semiconductors [3] and metals [4], since the method gives good stoichiometry [5] and the ablated particles have high energy [6]. Although laser-ablated films are so characterized that their surface is finer than that of vacuum-evaporated films [7], the surface roughness and micro-cracks are not negligible.…”

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confidence: 99%

Nanoscale evaluation of surface roughness of metal films prepared by laser ablation

Sumomogi

Sakai

Nakata

et al. 1998

Applied Physics A: Materials Science & Processing

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The surface roughness of laser-ablated metal films is evaluated by an atomic force microscope (AFM). The films are deposited on glass substrates using a pulsed Nd:YAG laser. The target is bulk metal such as Ni and Ti. The AFM is confirmed to be a useful tool for measurements of surface roughness on the nanometer scale. Measured values may differ from the real value, depending on the tip radius and the roughness. The reliability of the measured value is discussed in consideration of the locus of the rolling-circle of a tip radius, using simple models. The roughness obtained is 4.3-6.9 nm maximum peak-valley height, and this value is found to be affected by the laser energy density.The laser ablation method has been developed for the preparation of thin films of superconductors [1, 2], semiconductors [3] and metals [4], since the method gives good stoichiometry [5] and the ablated particles have high energy [6]. Although laser-ablated films are so characterized that their surface is finer than that of vacuum-evaporated films [7], the surface roughness and micro-cracks are not negligible. The surface roughness is one of the interesting problems in the film physics and technology. Studies on the composition [5], crystal structure [8] and grain size [9] of the laser-ablated films have been examined, while a report concerning the nanoscale surface roughness has not been made to date.The scanning probe microscope (SPM), which is classified into the scanning tunneling microscope (STM) and the atomic force microscope (AFM), is capable of measurements of surface roughness on the nanometer scale [10]. The STM has been used in roughness measurements [11][12][13] and the reliability of this method is discussed [13]. However, reports concerning surface roughness using the AFM seem to be few [14].In this paper, we describe the roughness evaluation of laser-ablated metal films obtained by the atomic force microscope (AFM), which is devised to detect the changes in the interaction forces between a tip and a sample. Measured values may deviate from the real value, depending on the tip radius and the roughness. We discuss the reliability of the measured value in consideration of the locus of the rollingcircle of a tip radius using simple models. ExperimentThe schematic of the main part of the laser ablation apparatus used for the present study is shown in Fig. 1. The chamber was evacuated to 5 × 10 −6 Torr using turbo and rotary pumps. The wavelength of the Nd:YAG laser for ablation was 355 nm (the third harmonic), the total energy was 150 mJ/pulse and the pulse width was 5 ns. The target was Ni plate or Ti plate, which was commercially available pure (99.99%) metal. The laser beam was focused on the target at an incidence angle of 60 • from the surface normal and operated at 10 pps. The laser energy density was varied between 1.5 × 10 −2 and 3.0 × 10 −2 J/mm 2 by changing the focusing position [7]. The distance between the slide glass substrate and the target was 30 mm, and the deposition time was 5 min. The laser-ablated plume wa...

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Systematics of thin films formed by excimer laser ablation: Results on SmBa2Cu3O7

Cited by 64 publications

References 6 publications

Characteristics of laser-induced plasma from highT c superconductor

Characteristics of laser-induced plasma from highT c superconductor

Plasma plume behavior of laser ablated cerium oxide: Effect of oxygen partial pressure

Nanoscale evaluation of surface roughness of metal films prepared by laser ablation

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