2021
DOI: 10.1007/s42341-021-00332-1
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Systematic Review on Design and Development of Efficient Semiconductor Based Surface Acoustic Wave Gas Sensor

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Cited by 7 publications
(5 citation statements)
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“…This type of sensor has a fast detection speed. [ 87 ] The electrical sensor system consists of a gas sensing element, a conversion circuit, and a power supplier. The gas sensing element is responsible for detecting the target gas and the conversion circuit converts the chemical signal from the gas sensing element into an electrical signal.…”
Section: Sensing Performance Indexesmentioning
confidence: 99%
“…This type of sensor has a fast detection speed. [ 87 ] The electrical sensor system consists of a gas sensing element, a conversion circuit, and a power supplier. The gas sensing element is responsible for detecting the target gas and the conversion circuit converts the chemical signal from the gas sensing element into an electrical signal.…”
Section: Sensing Performance Indexesmentioning
confidence: 99%
“…25 In this regard, gas sensors with portability, low price, and online response are preferred for practical applications. There are various gas sensors such as surface acoustic waves, 26 gasochromic, 27 optical, 28 and resistive. 29 Among them, resistive gas sensors are highly popular thanks to their high sensitivity, stability, fast response time (t res ), and affordability.…”
Section: Introductionmentioning
confidence: 99%
“…To date, SAW microdevices are coated with a suitable sensing material, such as metal oxides or metals, to sense the targeted gas effectively [7][8][9] . Among different metal oxides, zinc oxide (ZnO) is widely used as a gas sensing material for detecting carbon dioxide (CO2), ammonia (NH3), and nitrogen dioxide (NO2) gases due to its superior physiochemical properties, long-term stability, and quick response time [10][11][12][13] .…”
Section: Introductionmentioning
confidence: 99%