Systematic Direct Solid Modeling Approach for Surface Micromachined MEMS

Abstract

Current MEMS design methods do not fulfill the needs of emerging complex MEMS devices. In this paper, a systematic direct solid modeling approach for surface micromachined MEMS design is proposed. In this approach, practical model of a surface micromachined MEMS device, designed in a traditional CAD environment, is simplified firstly; after simplification, masks and process sequences are generated through solid-based mask synthesis; then local variation is used to refining the 3D layer model; finally masks and process sequences are verified in rough simulation and accurate simulation. The approach aims at enabling designers to focus on creative design activity in an intuitive mode.

Feature-Based 3D Process Planning for MEMS Fabrication

“…Li et al [11] recently proposed an integrated process planning system where feasible process plans could be found from the device model with detail shapes, micro-fabrication process could be simulated, and variational propagation between feasible process plan and manufacturable device geometry and mask geometries is realized. However, the process planning method still had the disadvantage similar to [9], and the technical details were not stated in the paper.…”