System-level integration of active silicon photonic biosensors

Laplatine, Loïc; Al'Mrayat, O.; Luan, Enxiao; Fang, Chao; Rezaiezadeh, S.; Ratner, Daniel M.; Cheung, Karen C.; Dattner, Yonathan; Chrostowski, Lukas

doi:10.1117/12.2256068

Cited by 7 publications

(14 citation statements)

References 31 publications

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“…On one hand, PDMS is not suitable for the integration or deposition of electrodes directly on the surface, and has problems such as adsorption of small hydrophobic molecules, swelling in organic solvents, water permeability, and incompatibility under very high-pressure operations [212]. On the other hand, due to the irreversible bonding process, chips are not reusable after mounting the PDMS microfluidic block, and most of the area on the chip only serves as a mechanical support for the fluidic inlet and outlet but not for sensing, which negatively impacts the unit cost [213].…”

Section: Optofluidic Integrationmentioning

confidence: 99%

“…SU-8 was originally developed as a high-resolution photoresist for the microelectronics industry. Because of its transparency in the near-infrared spectrum and biocompatibility, a thin layer of SU-8 coating with microfluidic patterns has been investigated on silicon photonic biosensing systems [45,213], which improves the alignment precision compared to PDMS microfluidics bonding. Furthermore, SU-8…”

Section: Optofluidic Integrationmentioning

confidence: 99%

“…Recent results showed Ge on Si PDs with a high responsivity of 0.74 A/W and low dark currents of less than 4 nA [269]. Their integration into an on-chip biosensor was also demonstrated in Ref [213], and its performance was analyzed. These characteristics make Ge-based PDs ideal for biosensing at a wavelength of 1.3 µm or 1.5 µm in the SOI platform.…”

Section: Wang Et Al Have Heterogeneously Integrated Iii/v Pds On Si mentioning

confidence: 99%

“…was selected for the microfluidic channels patterning as well as electrical connections passivation. By characterizing on-chip Ge PD components in the photovoltaic mode, they demonstrated an approach for biomolecule detections even with a low optical power [213]. In addition, sensor performance was also characterized by introducing standard NaCl solutions and bio-sandwich assays to FOWLP-packaged chips.…”

Section: State-of-the-art Cmos-chip Packagingmentioning

confidence: 99%

“…Similar approaches have been considered for PICs. Laplatine et al developed a novel system-level architecture by embedding the individual photonic-electronic die into a 2-inch epoxy wafer, with electrical interconnects and microfluidic channels based on a lab-scale Fan-Out Wafer-Level-Packaging process (FOWLP) presented inFigure 14b[213]. SU-8…”

mentioning

confidence: 99%

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Silicon Photonic Biosensors Using Label-Free Detection

Luan

Shoman

Ratner

et al. 2018

Preprint

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Thanks to advanced semiconductor microfabrication technology, chip-scale integration and miniaturization of lab-on-a-chip components, silicon-based optical biosensors have made significant progress for the purpose of point-of-care diagnosis. In this review, we provide an overview of the state-of-the-art in evanescent field biosensing technologies including interferometer, microcavity, photonic crystal, and Bragg grating waveguide-based sensors. Their sensing mechanisms and sensor performances, as well as real biomarkers for label-free detection, are exhibited and compared. We also review the development of chip-level integration for lab-on-a-chip photonic sensing platforms, which consist of the optical sensing device, flow delivery system, optical input and readout equipment. At last, some advanced system-level CMOS-chip packaging examples are presented, indicating the commercialization potential for the low cost, high yield, portable biosensing platform leveraging CMOS processes.

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Section: Optofluidic Integrationmentioning

confidence: 99%

Section: Optofluidic Integrationmentioning

confidence: 99%

Section: Wang Et Al Have Heterogeneously Integrated Iii/v Pds On Si mentioning

confidence: 99%

Section: State-of-the-art Cmos-chip Packagingmentioning

confidence: 99%

mentioning

confidence: 99%

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Silicon Photonic Biosensors Using Label-Free Detection

Luan

Shoman

Ratner

et al. 2018

Preprint

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Optofluidic sensor system with Ge PIN photodetector for CMOS-compatible sensing

Augel

Berkmann

Latta

et al. 2017

Microfluid Nanofluid

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On-chip infrared photonics with Si-Ge-heterostructures: What is next?

et al. 2022

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The integration of Ge on Si for photonics applications has reached a high level of maturity: Ge photodetectors are available on the Si platform in foundry processes, and Si/Ge heterostructure multiple quantum-well photodiodes are rapidly progressing towards applications in light modulation. These successes result from decades of development of high-quality material growth and integration, which, more recently, has sparked an increasingly broad field of photonic device research based on Si/Ge heterostructures that extends from quantum cascade lasers to sensors. Here, we highlight selected recent structure and device developments as well as possible future trends that are enabled by the maturity of the SiGe material platform.

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System-level integration of active silicon photonic biosensors

Cited by 7 publications

References 31 publications

Silicon Photonic Biosensors Using Label-Free Detection

Silicon Photonic Biosensors Using Label-Free Detection

Optofluidic sensor system with Ge PIN photodetector for CMOS-compatible sensing

On-chip infrared photonics with Si-Ge-heterostructures: What is next?

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