“…Thus, analyzing both characteristics of the structure together as a system model is important and necessary for efficient optimization. Therefore, equivalent circuit models have been suggested to represent the dynamics of MEMS devices [14,15,16,17] and are integrated into commercial software, namely, MATLAB Simulink (Natick, MA, USA) [18,19]. To consider the thermal or other environmental factors, the finite-element model of a MEMS device is often used, which is characterized by its dynamic flexibility [20,21].…”